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Mechanical characterisation of nanocrystalline graphite using micromechanical structures

Mechanical characterisation of nanocrystalline graphite using micromechanical structures
Mechanical characterisation of nanocrystalline graphite using micromechanical structures
Conductive nanocrystalline graphite has been deposited using plasma-enhanced chemical vapour deposition at 750 °C, directly onto silicon substrates without any catalyst and fabricated into micromechanical membrane and beam structures. Using the buckling profile of the membrane and beam structures, we measure a built-in strain of - 0.0142 and through wafer-bow measurement, a compressive stress of 436 MPa. From this we have calculated the Young's modulus of nanographite as 23.0 ± 2.7 GPa. This represents a scalable method for fabricating nanographite MEMS and NEMS devices via a microfabrication-compatible process and provides useful mechanical properties to enable design of future devices.
0167-9317
184-189
Fishlock, Sam
b35c425e-91f5-40a1-b3a7-d2939463fb19
Grech, David
f44a3fe2-5f50-4192-9018-3fccd1612ceb
McBride, John
d9429c29-9361-4747-9ba3-376297cb8770
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Fishlock, Sam
b35c425e-91f5-40a1-b3a7-d2939463fb19
Grech, David
f44a3fe2-5f50-4192-9018-3fccd1612ceb
McBride, John
d9429c29-9361-4747-9ba3-376297cb8770
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43

Fishlock, Sam, Grech, David, McBride, John, Chong, Harold and Pu, Suan-Hui (2016) Mechanical characterisation of nanocrystalline graphite using micromechanical structures. [in special issue: Micro/Nano Devices and Systems 2015] Microelectronic Engineering, 159, 184-189. (doi:10.1016/j.mee.2016.03.040).

Record type: Article

Abstract

Conductive nanocrystalline graphite has been deposited using plasma-enhanced chemical vapour deposition at 750 °C, directly onto silicon substrates without any catalyst and fabricated into micromechanical membrane and beam structures. Using the buckling profile of the membrane and beam structures, we measure a built-in strain of - 0.0142 and through wafer-bow measurement, a compressive stress of 436 MPa. From this we have calculated the Young's modulus of nanographite as 23.0 ± 2.7 GPa. This represents a scalable method for fabricating nanographite MEMS and NEMS devices via a microfabrication-compatible process and provides useful mechanical properties to enable design of future devices.

Full text not available from this repository.

More information

Accepted/In Press date: 22 March 2016
e-pub ahead of print date: 26 March 2016
Published date: 15 June 2016
Organisations: Mechatronics, Engineering Science Unit

Identifiers

Local EPrints ID: 391082
URI: https://eprints.soton.ac.uk/id/eprint/391082
ISSN: 0167-9317
PURE UUID: 63cfd3ff-e750-46bc-bb47-538f7c5da5a0
ORCID for Harold Chong: ORCID iD orcid.org/0000-0002-7110-5761
ORCID for Suan-Hui Pu: ORCID iD orcid.org/0000-0002-3335-8880

Catalogue record

Date deposited: 07 Apr 2016 15:59
Last modified: 03 Dec 2019 01:44

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