Mechanical characterisation of nanocrystalline graphite using micromechanical structures
Mechanical characterisation of nanocrystalline graphite using micromechanical structures
Conductive nanocrystalline graphite has been deposited using plasma-enhanced chemical vapour deposition at 750 °C, directly onto silicon substrates without any catalyst and fabricated into micromechanical membrane and beam structures. Using the buckling profile of the membrane and beam structures, we measure a built-in strain of - 0.0142 and through wafer-bow measurement, a compressive stress of 436 MPa. From this we have calculated the Young's modulus of nanographite as 23.0 ± 2.7 GPa. This represents a scalable method for fabricating nanographite MEMS and NEMS devices via a microfabrication-compatible process and provides useful mechanical properties to enable design of future devices.
184-189
Fishlock, Sam
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Grech, David
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McBride, John
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Chong, Harold
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Pu, Suan-Hui
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15 June 2016
Fishlock, Sam
b35c425e-91f5-40a1-b3a7-d2939463fb19
Grech, David
f44a3fe2-5f50-4192-9018-3fccd1612ceb
McBride, John
d9429c29-9361-4747-9ba3-376297cb8770
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Fishlock, Sam, Grech, David, McBride, John, Chong, Harold and Pu, Suan-Hui
(2016)
Mechanical characterisation of nanocrystalline graphite using micromechanical structures.
[in special issue: Micro/Nano Devices and Systems 2015]
Microelectronic Engineering, 159, .
(doi:10.1016/j.mee.2016.03.040).
Abstract
Conductive nanocrystalline graphite has been deposited using plasma-enhanced chemical vapour deposition at 750 °C, directly onto silicon substrates without any catalyst and fabricated into micromechanical membrane and beam structures. Using the buckling profile of the membrane and beam structures, we measure a built-in strain of - 0.0142 and through wafer-bow measurement, a compressive stress of 436 MPa. From this we have calculated the Young's modulus of nanographite as 23.0 ± 2.7 GPa. This represents a scalable method for fabricating nanographite MEMS and NEMS devices via a microfabrication-compatible process and provides useful mechanical properties to enable design of future devices.
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Accepted/In Press date: 22 March 2016
e-pub ahead of print date: 26 March 2016
Published date: 15 June 2016
Organisations:
Mechatronics, Engineering Science Unit
Identifiers
Local EPrints ID: 391082
URI: http://eprints.soton.ac.uk/id/eprint/391082
ISSN: 0167-9317
PURE UUID: 63cfd3ff-e750-46bc-bb47-538f7c5da5a0
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Date deposited: 07 Apr 2016 15:59
Last modified: 15 Mar 2024 04:02
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Author:
Sam Fishlock
Author:
David Grech
Author:
Harold Chong
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