The University of Southampton
University of Southampton Institutional Repository

Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator

Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator
Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator
This paper reports on the design and electrical characterization of a single crystal silicon micromechanical square-plate resonator. The microresonator has been excited in the anti-symmetrical wine glass mode at a resonant frequency of 5.166 MHz and exhibits an impressive quality factor (Q) of 3.7 × 106 at a pressure of 33 mtorr. The device has been fabricated in a commercial foundry process. An associated motional resistance of approximately 50 k? using a dc bias voltage of 60 V is measured for a transduction gap of 2 µm due to the ultra-high Q of the resonator. This result corresponds to a frequency-Q product of 1.9 × 1013, the highest reported for a fundamental mode single-crystal silicon resonator and on par with some of the best quartz crystal resonators. The results are indicative of the superior performance of silicon as a mechanical material, and show that the wine glass resonant mode is beneficial for achieving high quality factors allowed by the material limit.
0960-1317
1-10
Lee, Joshua E.-Y.
ccb36662-e370-49bf-af3d-ee047bd230df
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, Ashwin A.
6fe2b5b5-e451-41e2-a23a-601c9faf7d8a
Lee, Joshua E.-Y.
ccb36662-e370-49bf-af3d-ee047bd230df
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, Ashwin A.
6fe2b5b5-e451-41e2-a23a-601c9faf7d8a

Lee, Joshua E.-Y., Yan, Jize and Seshia, Ashwin A. (2009) Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator. Journal of Micromechanics and Microengineering, 19 (7), 1-10. (doi:10.1088/0960-1317/19/7/074003).

Record type: Article

Abstract

This paper reports on the design and electrical characterization of a single crystal silicon micromechanical square-plate resonator. The microresonator has been excited in the anti-symmetrical wine glass mode at a resonant frequency of 5.166 MHz and exhibits an impressive quality factor (Q) of 3.7 × 106 at a pressure of 33 mtorr. The device has been fabricated in a commercial foundry process. An associated motional resistance of approximately 50 k? using a dc bias voltage of 60 V is measured for a transduction gap of 2 µm due to the ultra-high Q of the resonator. This result corresponds to a frequency-Q product of 1.9 × 1013, the highest reported for a fundamental mode single-crystal silicon resonator and on par with some of the best quartz crystal resonators. The results are indicative of the superior performance of silicon as a mechanical material, and show that the wine glass resonant mode is beneficial for achieving high quality factors allowed by the material limit.

Text
[24] jmm9_7_074003.pdf - Version of Record
Restricted to Repository staff only
Request a copy

More information

Published date: 30 June 2009
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 394187
URI: https://eprints.soton.ac.uk/id/eprint/394187
ISSN: 0960-1317
PURE UUID: 68c4f206-2f10-4c38-bf58-412c6bc9080f
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

Catalogue record

Date deposited: 01 Jun 2016 15:45
Last modified: 18 Jul 2019 13:30

Export record

Altmetrics

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×