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Strain sensing on steel surfaces using vacuum packaged MEMS resonators

Strain sensing on steel surfaces using vacuum packaged MEMS resonators
Strain sensing on steel surfaces using vacuum packaged MEMS resonators
The paper presents a technology for strain sensing on steel using resonant MEMS packaged in vacuum. For this purpose, a custom sensor fabrication technology and a novel vacuum packaging technique have been developed. The MEMS sensors have been fabricated by surface micromachining of thick (15 ?m) Silicon On Insulator substrates with heavily doped handle layers View the MathML source(?=0.005?cm). Using this process, Double-Ended Tuning Fork (DETF) parallel-plate resonators with reduced coupling gaps (less than 1 ?m) have been fabricated, using a high-performance Deep Reactive Ion Etching performed on submicrometer features realized by near-UV lithography combined with a maskless line narrowing technique. The devices have been bonded to a thin steel bar by epoxy glue, packaged in vacuum and tested by applying strain to the bar, showing good tolerances to packaging parasitics, measurement reversibility, and strain sensitivity of View the MathML source10Hz/??.
1426-1429
Ferri, Matteo
42a2809c-1bb6-4c74-ab6b-c07b040691e0
Mancarella, Fulvio
853a983e-aaec-45fc-8a63-ee05d3fc28c8
Belsito, Luca
7493888b-85dd-4dea-9393-ff96454a861a
Roncaglia, Alberto
b52a196f-c2f1-4b41-9dec-4f09f4059564
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, Ashwin A.
6fe2b5b5-e451-41e2-a23a-601c9faf7d8a
Soga, Kenichi
e43028e3-af4d-4ea4-a747-6cc6dacc849b
Zaleshy, Jan
06c625dd-29e8-4b79-9c91-d2186ad7783f
Ferri, Matteo
42a2809c-1bb6-4c74-ab6b-c07b040691e0
Mancarella, Fulvio
853a983e-aaec-45fc-8a63-ee05d3fc28c8
Belsito, Luca
7493888b-85dd-4dea-9393-ff96454a861a
Roncaglia, Alberto
b52a196f-c2f1-4b41-9dec-4f09f4059564
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, Ashwin A.
6fe2b5b5-e451-41e2-a23a-601c9faf7d8a
Soga, Kenichi
e43028e3-af4d-4ea4-a747-6cc6dacc849b
Zaleshy, Jan
06c625dd-29e8-4b79-9c91-d2186ad7783f

Ferri, Matteo, Mancarella, Fulvio, Belsito, Luca, Roncaglia, Alberto, Yan, Jize, Seshia, Ashwin A., Soga, Kenichi and Zaleshy, Jan (2010) Strain sensing on steel surfaces using vacuum packaged MEMS resonators [in special issue: Eurosensor XXIV Conference] Procedia Engineering, 5, pp. 1426-1429. (doi:10.1016/j.proeng.2010.09.383).

Record type: Article

Abstract

The paper presents a technology for strain sensing on steel using resonant MEMS packaged in vacuum. For this purpose, a custom sensor fabrication technology and a novel vacuum packaging technique have been developed. The MEMS sensors have been fabricated by surface micromachining of thick (15 ?m) Silicon On Insulator substrates with heavily doped handle layers View the MathML source(?=0.005?cm). Using this process, Double-Ended Tuning Fork (DETF) parallel-plate resonators with reduced coupling gaps (less than 1 ?m) have been fabricated, using a high-performance Deep Reactive Ion Etching performed on submicrometer features realized by near-UV lithography combined with a maskless line narrowing technique. The devices have been bonded to a thin steel bar by epoxy glue, packaged in vacuum and tested by applying strain to the bar, showing good tolerances to packaging parasitics, measurement reversibility, and strain sensitivity of View the MathML source10Hz/??.

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More information

e-pub ahead of print date: 23 October 2010
Published date: 2010
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 394189
URI: http://eprints.soton.ac.uk/id/eprint/394189
PURE UUID: cc9b4bb8-22d1-4f4a-a8fb-fd35d4bac646
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

Catalogue record

Date deposited: 01 Jun 2016 15:48
Last modified: 17 Jul 2017 19:02

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Contributors

Author: Matteo Ferri
Author: Fulvio Mancarella
Author: Luca Belsito
Author: Alberto Roncaglia
Author: Jize Yan ORCID iD
Author: Ashwin A. Seshia
Author: Kenichi Soga
Author: Jan Zaleshy

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