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2.2MHz piezoresistive MEMS oscillator operating in air

2.2MHz piezoresistive MEMS oscillator operating in air
2.2MHz piezoresistive MEMS oscillator operating in air
This paper describes a MEMS oscillator capable of operation at atmospheric pressure, based on a square-extensional mode single crystal silicon resonator. The resonator is actuated by differential capacitive driving and the motion of the structure is transduced piezoresistively. This transduction scheme successfully mitigates the effects of capacitive feedthrough and enhances the motional signal at micron scale transduction gaps. The oscillator demonstrates an Allan deviation of close to 1 ppm at an integration time of 200 seconds for an output power level of 0 dBm.
1498-1501
Lin, Angel T.-H.
9a64197d-3714-449c-9720-9ef4ea5f2689
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, Ashwin A.
6fe2b5b5-e451-41e2-a23a-601c9faf7d8a
Lin, Angel T.-H.
9a64197d-3714-449c-9720-9ef4ea5f2689
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, Ashwin A.
6fe2b5b5-e451-41e2-a23a-601c9faf7d8a

Lin, Angel T.-H., Yan, Jize and Seshia, Ashwin A. (2010) 2.2MHz piezoresistive MEMS oscillator operating in air [in special issue: Eurosensor XXIV Conference] Procedia Engineering, 5, pp. 1498-1501. (doi:10.1016/j.proeng.2010.09.401).

Record type: Article

Abstract

This paper describes a MEMS oscillator capable of operation at atmospheric pressure, based on a square-extensional mode single crystal silicon resonator. The resonator is actuated by differential capacitive driving and the motion of the structure is transduced piezoresistively. This transduction scheme successfully mitigates the effects of capacitive feedthrough and enhances the motional signal at micron scale transduction gaps. The oscillator demonstrates an Allan deviation of close to 1 ppm at an integration time of 200 seconds for an output power level of 0 dBm.

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e-pub ahead of print date: 23 October 2010
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 394192
URI: http://eprints.soton.ac.uk/id/eprint/394192
PURE UUID: d9d65738-628f-4539-b370-04214e8c8e8e
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

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Date deposited: 01 Jun 2016 15:52
Last modified: 17 Jul 2017 19:02

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Contributors

Author: Angel T.-H. Lin
Author: Jize Yan ORCID iD
Author: Ashwin A. Seshia

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