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Methods for enhanced electrical transduction and characterization of micromechanical resonators

Methods for enhanced electrical transduction and characterization of micromechanical resonators
Methods for enhanced electrical transduction and characterization of micromechanical resonators
This paper details the design and enhanced electrical transduction of a bulk acoustic mode resonator fabricated in a commercial foundry MEMS process utilizing 2.5 ?m gaps. The I–V characteristics of electrically addressed silicon resonators are often dominated by capacitive parasitics, inherent to hybrid technologies. This paper benchmarks a variety of drive and detection principles for electrostatically driven square-extensional mode resonators operating in air via analytical models accompanied by measurements of fabricated devices with the primary aim of enhancing the ratio of the motional to feedthrough current at nominal operating voltages. In view of ultimately enhancing the motional to feedthrough current ratio, a new detection technique that combines second harmonic capacitive actuation and piezoresistive detection is presented herein. This new method is shown to outperform previously reported methods utilizing voltages as low as ±3 V in air, providing a promising solution for low voltage CMOS-MEMS integration. To elucidate the basis of this improvement in signal output from measured devices, an approximate analytical model for piezoresistive sensing specific to the resonator topology reported here is also developed and presented.
0924-4247
263-272
Lin, A.T.-H.
cc7ed4a9-e955-442a-9774-5a563d4f3fbb
Lee, J.E.-Y.
c02ee4c0-613b-4676-9cd7-e100ee49d323
Yan, J.
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A.A.
a2825499-d051-44ef-b545-4a312c64cf59
Lin, A.T.-H.
cc7ed4a9-e955-442a-9774-5a563d4f3fbb
Lee, J.E.-Y.
c02ee4c0-613b-4676-9cd7-e100ee49d323
Yan, J.
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A.A.
a2825499-d051-44ef-b545-4a312c64cf59

Lin, A.T.-H., Lee, J.E.-Y., Yan, J. and Seshia, A.A. (2010) Methods for enhanced electrical transduction and characterization of micromechanical resonators Sensors and Actuators A: Physical, 158, (2), pp. 263-272. (doi:10.1016/j.sna.2010.01.024).

Record type: Article

Abstract

This paper details the design and enhanced electrical transduction of a bulk acoustic mode resonator fabricated in a commercial foundry MEMS process utilizing 2.5 ?m gaps. The I–V characteristics of electrically addressed silicon resonators are often dominated by capacitive parasitics, inherent to hybrid technologies. This paper benchmarks a variety of drive and detection principles for electrostatically driven square-extensional mode resonators operating in air via analytical models accompanied by measurements of fabricated devices with the primary aim of enhancing the ratio of the motional to feedthrough current at nominal operating voltages. In view of ultimately enhancing the motional to feedthrough current ratio, a new detection technique that combines second harmonic capacitive actuation and piezoresistive detection is presented herein. This new method is shown to outperform previously reported methods utilizing voltages as low as ±3 V in air, providing a promising solution for low voltage CMOS-MEMS integration. To elucidate the basis of this improvement in signal output from measured devices, an approximate analytical model for piezoresistive sensing specific to the resonator topology reported here is also developed and presented.

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Accepted/In Press date: 18 January 2010
e-pub ahead of print date: 25 January 2010
Published date: March 2010
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 394194
URI: http://eprints.soton.ac.uk/id/eprint/394194
ISSN: 0924-4247
PURE UUID: 8a55699f-68b8-48e4-bed2-c970428a9e9a
ORCID for J. Yan: ORCID iD orcid.org/0000-0002-2886-2847

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Date deposited: 01 Jun 2016 15:56
Last modified: 17 Jul 2017 19:02

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Contributors

Author: A.T.-H. Lin
Author: J.E.-Y. Lee
Author: J. Yan ORCID iD
Author: A.A. Seshia

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