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Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity

Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity
Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity
We use the phenomena of mode localization and vibration confinement in pairs of weakly coupled, nearly identical microelectromechanical(MEMS)resonators as an ultrasensitive technique of detecting added mass on the resonator. The variations in the eigenstates for induced mass additions are studied and compared with corresponding resonant frequency shifts in pairs of MEMSresonators that are coupled electrostatically. We demonstrate that the relative shifts in the eigenstates can be over three orders of magnitude greater than those in resonant frequency for the same addition of mass. We also investigate the effects of voltage controlled electrical spring tuning on the parametric sensitivity of such sensors and demonstrate sensitivities tunable by over 400%.
0003-6951
1-3
Thiruvenkatanathan, P.
9020271f-d8c8-4ecf-84c9-bef0e0f60e1f
Yan, J.
786dc090-843b-435d-adbe-1d35e8fc5828
Woodhouse, J.
a6bf224d-2fea-45e5-bc32-055a17550ca0
Aziz, A.
859fe7f2-3a73-48fe-907d-fc60eb4c2815
Seshia, A.A.
a2825499-d051-44ef-b545-4a312c64cf59
Thiruvenkatanathan, P.
9020271f-d8c8-4ecf-84c9-bef0e0f60e1f
Yan, J.
786dc090-843b-435d-adbe-1d35e8fc5828
Woodhouse, J.
a6bf224d-2fea-45e5-bc32-055a17550ca0
Aziz, A.
859fe7f2-3a73-48fe-907d-fc60eb4c2815
Seshia, A.A.
a2825499-d051-44ef-b545-4a312c64cf59

Thiruvenkatanathan, P., Yan, J., Woodhouse, J., Aziz, A. and Seshia, A.A. (2010) Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity. Applied Physics Letters, 96 (81913), 1-3. (doi:10.1063/1.3315877).

Record type: Article

Abstract

We use the phenomena of mode localization and vibration confinement in pairs of weakly coupled, nearly identical microelectromechanical(MEMS)resonators as an ultrasensitive technique of detecting added mass on the resonator. The variations in the eigenstates for induced mass additions are studied and compared with corresponding resonant frequency shifts in pairs of MEMSresonators that are coupled electrostatically. We demonstrate that the relative shifts in the eigenstates can be over three orders of magnitude greater than those in resonant frequency for the same addition of mass. We also investigate the effects of voltage controlled electrical spring tuning on the parametric sensitivity of such sensors and demonstrate sensitivities tunable by over 400%.

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Accepted/In Press date: 19 January 2010
e-pub ahead of print date: 25 February 2010
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 394195
URI: http://eprints.soton.ac.uk/id/eprint/394195
ISSN: 0003-6951
PURE UUID: 6a313119-d73f-45b2-a92d-a098b26be317
ORCID for J. Yan: ORCID iD orcid.org/0000-0002-2886-2847

Catalogue record

Date deposited: 01 Jun 2016 16:00
Last modified: 26 Nov 2019 01:32

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Contributors

Author: P. Thiruvenkatanathan
Author: J. Yan ORCID iD
Author: J. Woodhouse
Author: A. Aziz
Author: A.A. Seshia

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