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Differential amplification of structural perturbations in weakly coupled MEMS resonators

Differential amplification of structural perturbations in weakly coupled MEMS resonators
Differential amplification of structural perturbations in weakly coupled MEMS resonators
Measuring shifts in eigenstates caused by vibration localization in an array of weakly coupled resonators offers 2 distinct advantages for sensor applications compared with the technique of simply measuring resonant frequency shifts: 1) orders of magnitude enhancement in parametric sensitivity; and 2) intrinsic common mode rejection. In this paper, we experimentally demonstrate the common mode rejection in weakly coupled MEMS resonators with significant potential implications for sensor applications. The vibration behavior is studied in pairs of nearly identical MEMS resonators that are electrically coupled and subjected to small perturbations in stiffness under different ambient pressure and temperature. The shifts in the eigenstates for the same parametric perturbation in stiffness are experimentally demonstrated to be more than 3 orders of magnitude greater than corresponding resonant frequency variations. They are also shown to remain relatively constant to variations in ambient temperature and pressure. This increased relative robustness to environmental drift, along with the advantage of ultra-high parametric sensitivity, opens the door to an alternative approach to achieving higher sensitivity and stability in micromechanical sensors.
0885-3010
690-697
Thiruvenkatanathan, Pradyumna
42613b52-d83d-4fa9-bc40-337201dfa2a0
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, Ashwin A.
6fe2b5b5-e451-41e2-a23a-601c9faf7d8a
Thiruvenkatanathan, Pradyumna
42613b52-d83d-4fa9-bc40-337201dfa2a0
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, Ashwin A.
6fe2b5b5-e451-41e2-a23a-601c9faf7d8a

Thiruvenkatanathan, Pradyumna, Yan, Jize and Seshia, Ashwin A. (2010) Differential amplification of structural perturbations in weakly coupled MEMS resonators. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 57 (3), 690-697. (doi:10.1109/TUFFC.2010.1466). (PMID:20211789)

Record type: Article

Abstract

Measuring shifts in eigenstates caused by vibration localization in an array of weakly coupled resonators offers 2 distinct advantages for sensor applications compared with the technique of simply measuring resonant frequency shifts: 1) orders of magnitude enhancement in parametric sensitivity; and 2) intrinsic common mode rejection. In this paper, we experimentally demonstrate the common mode rejection in weakly coupled MEMS resonators with significant potential implications for sensor applications. The vibration behavior is studied in pairs of nearly identical MEMS resonators that are electrically coupled and subjected to small perturbations in stiffness under different ambient pressure and temperature. The shifts in the eigenstates for the same parametric perturbation in stiffness are experimentally demonstrated to be more than 3 orders of magnitude greater than corresponding resonant frequency variations. They are also shown to remain relatively constant to variations in ambient temperature and pressure. This increased relative robustness to environmental drift, along with the advantage of ultra-high parametric sensitivity, opens the door to an alternative approach to achieving higher sensitivity and stability in micromechanical sensors.

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Published date: March 2010
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 394196
URI: http://eprints.soton.ac.uk/id/eprint/394196
ISSN: 0885-3010
PURE UUID: d65d3ee6-8017-438f-9764-185971983df9
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

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Date deposited: 01 Jun 2016 16:01
Last modified: 12 Nov 2019 01:34

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