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Internal electrical and mechanical phase inversion for coupled resonator array MEMS Filters

Internal electrical and mechanical phase inversion for coupled resonator array MEMS Filters
Internal electrical and mechanical phase inversion for coupled resonator array MEMS Filters
This paper reports on MEMS filters based on coupled resonator arrays designed using internal mechanical and electrical phase inversion principles. Four types of filter arrangements are described and their experimental validation using electrically and mechanically coupled silicon microfabricated resonators is presented. The internal phase inversion mechanisms are classified into four different categories based on the inversion principle and the nature of the coupling. The effects of capacitive parasitics on filter characteristics can be addressed by combining coupling mechanisms with phase inversion techniques without using external electrical phase inverter circuits. Filter metrics such as in-band ripple and minimum bandwidth are quantified and compared to previously reported results for silicon microresonators. The internal phase inversion mechanism enhances the design domain for MEMS resonator based filters. While, this paper discusses only a subset of resonator topologies, the principle can be extended to filters based on other resonator topologies as well. The techniques described here have applicability not only to the design of filters but also to the more effective interfacing to resonators in the presence of relatively large capacitive feedthrough parasitics.
0924-4247
18-29
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, Ashwin A.
6fe2b5b5-e451-41e2-a23a-601c9faf7d8a
Phan, Kim L.
d9e27a97-06ed-46fd-adb6-a700d0562d97
van Beek, Joost T.M.
fa162d90-8568-4bbf-895d-03ef9d81013f
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, Ashwin A.
6fe2b5b5-e451-41e2-a23a-601c9faf7d8a
Phan, Kim L.
d9e27a97-06ed-46fd-adb6-a700d0562d97
van Beek, Joost T.M.
fa162d90-8568-4bbf-895d-03ef9d81013f

Yan, Jize, Seshia, Ashwin A., Phan, Kim L. and van Beek, Joost T.M. (2010) Internal electrical and mechanical phase inversion for coupled resonator array MEMS Filters. Sensors and Actuators A: Physical, 158 (1), 18-29. (doi:10.1016/j.sna.2009.12.011).

Record type: Article

Abstract

This paper reports on MEMS filters based on coupled resonator arrays designed using internal mechanical and electrical phase inversion principles. Four types of filter arrangements are described and their experimental validation using electrically and mechanically coupled silicon microfabricated resonators is presented. The internal phase inversion mechanisms are classified into four different categories based on the inversion principle and the nature of the coupling. The effects of capacitive parasitics on filter characteristics can be addressed by combining coupling mechanisms with phase inversion techniques without using external electrical phase inverter circuits. Filter metrics such as in-band ripple and minimum bandwidth are quantified and compared to previously reported results for silicon microresonators. The internal phase inversion mechanism enhances the design domain for MEMS resonator based filters. While, this paper discusses only a subset of resonator topologies, the principle can be extended to filters based on other resonator topologies as well. The techniques described here have applicability not only to the design of filters but also to the more effective interfacing to resonators in the presence of relatively large capacitive feedthrough parasitics.

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Accepted/In Press date: 10 December 2009
Published date: March 2010
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 394197
URI: http://eprints.soton.ac.uk/id/eprint/394197
ISSN: 0924-4247
PURE UUID: aea32c21-4508-4204-a115-48ebd25e08c2
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

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Date deposited: 10 Jun 2016 15:50
Last modified: 26 Nov 2019 01:32

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Contributors

Author: Jize Yan ORCID iD
Author: Ashwin A. Seshia
Author: Kim L. Phan
Author: Joost T.M. van Beek

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