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Pulsed laser deposition of KNbO3

Pulsed laser deposition of KNbO3
Pulsed laser deposition of KNbO3
The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films.
• A practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance and applications.
• Covers core processes and applications in the semiconductor industry and new developments in the photovoltaic and optical thin film industries.
• The new edition takes covers the transition taking place in the semiconductor world from Al/SiO2 to copper interconnects with low-k dielectrics.
• Written by acknowledged industry experts from key companies in the semiconductor industry including Intel and IBM.
• Foreword by Gordon E. Moore, co-founder of Intel and formulator of the renowned ‘Moore’s Law’ relating to the technology development cycle in the semiconductor industry.
IOP Publishing
Zaldo, C.
fed559d7-64ba-4a7a-91d8-bb2ce13ee8e0
Eason, R.
e38684c3-d18c-41b9-a4aa-def67283b020
Gill, D.S.
0837886a-5999-478f-8b32-ea1996611c3c
Glocker, D.
Zaldo, C.
fed559d7-64ba-4a7a-91d8-bb2ce13ee8e0
Eason, R.
e38684c3-d18c-41b9-a4aa-def67283b020
Gill, D.S.
0837886a-5999-478f-8b32-ea1996611c3c
Glocker, D.

Zaldo, C., Eason, R. and Gill, D.S. (1995) Pulsed laser deposition of KNbO3. In, Glocker, D. (ed.) Handbook of Thin Film Process Technology. Bristol, GB. IOP Publishing.

Record type: Book Section

Abstract

The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films.
• A practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance and applications.
• Covers core processes and applications in the semiconductor industry and new developments in the photovoltaic and optical thin film industries.
• The new edition takes covers the transition taking place in the semiconductor world from Al/SiO2 to copper interconnects with low-k dielectrics.
• Written by acknowledged industry experts from key companies in the semiconductor industry including Intel and IBM.
• Foreword by Gordon E. Moore, co-founder of Intel and formulator of the renowned ‘Moore’s Law’ relating to the technology development cycle in the semiconductor industry.

Full text not available from this repository.

More information

Published date: 1995
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 394290
URI: https://eprints.soton.ac.uk/id/eprint/394290
PURE UUID: 9372a2ea-9747-4110-af8c-30713c844acb
ORCID for R. Eason: ORCID iD orcid.org/0000-0001-9704-2204

Catalogue record

Date deposited: 17 Jun 2016 13:33
Last modified: 06 Jun 2018 13:13

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