The University of Southampton
University of Southampton Institutional Repository

Study of lateral mode SOI-MEMS resonators for reduced anchor loss

Study of lateral mode SOI-MEMS resonators for reduced anchor loss
Study of lateral mode SOI-MEMS resonators for reduced anchor loss
MEMS resonators fabricated in silicon-on-insulator (SOI) technology must be clamped to the substrate via anchoring stems connected either from within the resonator or through the sides, with the side-clamped solution often employed due to manufacturing constraints. This paper examines the effect of two types of commonly used side-clamped, anchoring-stem geometries on the quality factor of three different laterally-driven resonator topologies. This study employs an analytical framework which considers the relative distribution of strain energies between the resonating body and clamping stems. The ratios of the strain energies are computed using ANSYS FEA and used to provide an indicator of the expected anchor-limited quality factors. Three MEMS resonator topologies have been fabricated and characterized in moderate vacuum. The associated measured quality factors are compared against the computed strain energy ratios, and the trends are shown to agree well with the experimental data.
0960-1317
1-10
Lee, Joshua E.-Y.
ccb36662-e370-49bf-af3d-ee047bd230df
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, Ashwin A.
6fe2b5b5-e451-41e2-a23a-601c9faf7d8a
Lee, Joshua E.-Y.
ccb36662-e370-49bf-af3d-ee047bd230df
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, Ashwin A.
6fe2b5b5-e451-41e2-a23a-601c9faf7d8a

Lee, Joshua E.-Y., Yan, Jize and Seshia, Ashwin A. (2011) Study of lateral mode SOI-MEMS resonators for reduced anchor loss. Journal of Micromechanics and Microengineering, 21 (4), 1-10. (doi:10.1088/0960-1317/21/4/045010).

Record type: Article

Abstract

MEMS resonators fabricated in silicon-on-insulator (SOI) technology must be clamped to the substrate via anchoring stems connected either from within the resonator or through the sides, with the side-clamped solution often employed due to manufacturing constraints. This paper examines the effect of two types of commonly used side-clamped, anchoring-stem geometries on the quality factor of three different laterally-driven resonator topologies. This study employs an analytical framework which considers the relative distribution of strain energies between the resonating body and clamping stems. The ratios of the strain energies are computed using ANSYS FEA and used to provide an indicator of the expected anchor-limited quality factors. Three MEMS resonator topologies have been fabricated and characterized in moderate vacuum. The associated measured quality factors are compared against the computed strain energy ratios, and the trends are shown to agree well with the experimental data.

Text
[48] Joshua jmm11_4_045010.pdf - Version of Record
Restricted to Repository staff only
Request a copy

More information

Published date: 4 March 2011
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 394378
URI: https://eprints.soton.ac.uk/id/eprint/394378
ISSN: 0960-1317
PURE UUID: 62298905-815a-4c79-b443-1880f2fa5bf9
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

Catalogue record

Date deposited: 17 Jun 2016 15:49
Last modified: 12 Nov 2019 01:34

Export record

Altmetrics

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×