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An investigation of structural dimension variation in electrostatically-coupled MEMS resonator pairs using mode-localization

An investigation of structural dimension variation in electrostatically-coupled MEMS resonator pairs using mode-localization
An investigation of structural dimension variation in electrostatically-coupled MEMS resonator pairs using mode-localization
If a pair of MEMS resonators are electrostatically coupled together, the vibration amplitude ratios at the resonant frequencies of the resulting coupled system are sensitive to stiffness perturbation. An imbalance between the two resonators causes the confinement of vibration energy when the system is resonating, an effect known as mode-localization. The degree of localization can be determined by extracting the amplitude ratio of the resonators through capacitive transduction. In this paper, we have fabricated MEMS devices, using a dicing-free silicon-on-insulator process, consisting of pairs of closely spaced microresonators. Each resonator consists of a clamped-clamped beam with a wider section in the middle, which is the location of the electrostatic coupling, instituted through the DC biasing of the resonators. Several devices have been fabricated, with the length of the anchor beams being varied, which influences the frequency of resonance. Stiffness imbalance between the resonators has been introduced through electrostatic spring softening, with the sensitivity of the amplitude ratio of the resonant mode shape being greater for the higher frequency, shorter anchor devices. The sensitivities of the devices in this study have been found to be 9 times greater than state-of-the-art two-degree-of-freedom mode-localized sensors.
1530-437X
8722-8730
Wood, Graham
61de1458-e7f5-4712-925a-a95bb44580ee
Zhao, Chun
00e81968-02a9-4b1c-8b63-97aa9fbfd4e9
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Sari, Ibrahim
cdcb1265-4a94-4c5a-b8b1-f1ca7e6759d7
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Wood, Graham
61de1458-e7f5-4712-925a-a95bb44580ee
Zhao, Chun
00e81968-02a9-4b1c-8b63-97aa9fbfd4e9
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Sari, Ibrahim
cdcb1265-4a94-4c5a-b8b1-f1ca7e6759d7
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f

Wood, Graham, Zhao, Chun, Pu, Suan-Hui, Sari, Ibrahim and Kraft, Michael (2016) An investigation of structural dimension variation in electrostatically-coupled MEMS resonator pairs using mode-localization. IEEE Sensors Journal, 16 (24), 8722-8730. (doi:10.1109/JSEN.2016.2573850).

Record type: Article

Abstract

If a pair of MEMS resonators are electrostatically coupled together, the vibration amplitude ratios at the resonant frequencies of the resulting coupled system are sensitive to stiffness perturbation. An imbalance between the two resonators causes the confinement of vibration energy when the system is resonating, an effect known as mode-localization. The degree of localization can be determined by extracting the amplitude ratio of the resonators through capacitive transduction. In this paper, we have fabricated MEMS devices, using a dicing-free silicon-on-insulator process, consisting of pairs of closely spaced microresonators. Each resonator consists of a clamped-clamped beam with a wider section in the middle, which is the location of the electrostatic coupling, instituted through the DC biasing of the resonators. Several devices have been fabricated, with the length of the anchor beams being varied, which influences the frequency of resonance. Stiffness imbalance between the resonators has been introduced through electrostatic spring softening, with the sensitivity of the amplitude ratio of the resonant mode shape being greater for the higher frequency, shorter anchor devices. The sensitivities of the devices in this study have been found to be 9 times greater than state-of-the-art two-degree-of-freedom mode-localized sensors.

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Accepted/In Press date: 25 May 2016
e-pub ahead of print date: 27 May 2016
Published date: 15 December 2016
Organisations: Nanoelectronics and Nanotechnology, Engineering Science Unit

Identifiers

Local EPrints ID: 396366
URI: https://eprints.soton.ac.uk/id/eprint/396366
ISSN: 1530-437X
PURE UUID: 6de38cac-c4b7-4961-9101-5d34c663b863
ORCID for Suan-Hui Pu: ORCID iD orcid.org/0000-0002-3335-8880

Catalogue record

Date deposited: 06 Jun 2016 07:51
Last modified: 26 Nov 2019 01:23

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