Optimised atmospheric pressure CVD of monoclinic VO2 thin films with picosecond phase transition
Optimised atmospheric pressure CVD of monoclinic VO2 thin films with picosecond phase transition
Monoclinic vanadium oxide (VO2) thin films with low roughness values were deposited and optimised by atmospheric pressure chemical vapour deposition using vanadium tetrachloride (VCl4) and water (H2O). Smooth VO2 films with good transmittance properties were successfully produced on fluorine doped tin oxide/borosilicate substrates. Systematic investigations confirmed that the quality (including phase) of films being produced strongly depended on substrate, deposition time, temperature, and precursor ratio within the process. Optical characterisation using ellipsometry revealed a strong thermochromic response of the films with a large change in the dielectric function, while time-resolved pump–probe transmission showed the picosecond nature of the phase transition
160-165
Gaskell, Jeffrey M.
9ee4a136-dcdc-4325-a6fb-509d55af6f1d
Afzaal, Mohammad
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Sheel, David W.
e18a1ba6-034a-475a-bd05-c2f1c333d351
Yates, Heather M.
41d55fe8-8530-4882-bc60-2261bfc315f8
Delfanazari, Kaveh
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Muskens, Otto
2284101a-f9ef-4d79-8951-a6cda5bfc7f9
6 January 2016
Gaskell, Jeffrey M.
9ee4a136-dcdc-4325-a6fb-509d55af6f1d
Afzaal, Mohammad
15c0c0f8-acd5-4e73-9b23-e1aa8f2c42d3
Sheel, David W.
e18a1ba6-034a-475a-bd05-c2f1c333d351
Yates, Heather M.
41d55fe8-8530-4882-bc60-2261bfc315f8
Delfanazari, Kaveh
e538911f-2398-4d3f-952f-ff2d908213b0
Muskens, Otto
2284101a-f9ef-4d79-8951-a6cda5bfc7f9
Gaskell, Jeffrey M., Afzaal, Mohammad, Sheel, David W., Yates, Heather M., Delfanazari, Kaveh and Muskens, Otto
(2016)
Optimised atmospheric pressure CVD of monoclinic VO2 thin films with picosecond phase transition.
Surface and Coatings Technology, 287, .
(doi:10.1016/j.surfcoat.2015.12.090).
Abstract
Monoclinic vanadium oxide (VO2) thin films with low roughness values were deposited and optimised by atmospheric pressure chemical vapour deposition using vanadium tetrachloride (VCl4) and water (H2O). Smooth VO2 films with good transmittance properties were successfully produced on fluorine doped tin oxide/borosilicate substrates. Systematic investigations confirmed that the quality (including phase) of films being produced strongly depended on substrate, deposition time, temperature, and precursor ratio within the process. Optical characterisation using ellipsometry revealed a strong thermochromic response of the films with a large change in the dielectric function, while time-resolved pump–probe transmission showed the picosecond nature of the phase transition
Text
Gaskell_submitted2016.pdf
- Accepted Manuscript
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Accepted/In Press date: 31 December 2015
Published date: 6 January 2016
Organisations:
Quantum, Light & Matter Group
Identifiers
Local EPrints ID: 397401
URI: http://eprints.soton.ac.uk/id/eprint/397401
ISSN: 0257-8972
PURE UUID: a2017a0e-2357-46b9-a651-c8e9f7072b50
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Date deposited: 30 Jun 2016 13:24
Last modified: 15 Mar 2024 05:42
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Contributors
Author:
Jeffrey M. Gaskell
Author:
Mohammad Afzaal
Author:
David W. Sheel
Author:
Heather M. Yates
Author:
Kaveh Delfanazari
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