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High-resolution strain sensing on steel by Silicon-On-Insulator flexural resonators fabricated with chip-level vacuum packaging

High-resolution strain sensing on steel by Silicon-On-Insulator flexural resonators fabricated with chip-level vacuum packaging
High-resolution strain sensing on steel by Silicon-On-Insulator flexural resonators fabricated with chip-level vacuum packaging
This paper reports on the fabrication and characterization of high-resolution strain sensors for steel based on Silicon On Insulator flexural resonators manufactured with chip-level LPCVD vacuum packaging. The sensors present high sensitivity (120 Hz/??), very high resolution (4 n?), low drift, and near-perfect reversibility in bending tests performed in both tensile and compressive strain regimes.
992-995
Belsito, Luca
7493888b-85dd-4dea-9393-ff96454a861a
Ferri, Matteo
42a2809c-1bb6-4c74-ab6b-c07b040691e0
Mancarella, Fulvio
853a983e-aaec-45fc-8a63-ee05d3fc28c8
Roncaglia, Alberto
b52a196f-c2f1-4b41-9dec-4f09f4059564
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A. Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Soga, Kenichi
e43028e3-af4d-4ea4-a747-6cc6dacc849b
Belsito, Luca
7493888b-85dd-4dea-9393-ff96454a861a
Ferri, Matteo
42a2809c-1bb6-4c74-ab6b-c07b040691e0
Mancarella, Fulvio
853a983e-aaec-45fc-8a63-ee05d3fc28c8
Roncaglia, Alberto
b52a196f-c2f1-4b41-9dec-4f09f4059564
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A. Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Soga, Kenichi
e43028e3-af4d-4ea4-a747-6cc6dacc849b

Belsito, Luca, Ferri, Matteo, Mancarella, Fulvio, Roncaglia, Alberto, Yan, Jize, Seshia, A. Ashwin and Soga, Kenichi (2013) High-resolution strain sensing on steel by Silicon-On-Insulator flexural resonators fabricated with chip-level vacuum packaging. Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Transducers (Transducers & Eurosensors XXVII), Spain. 16 - 20 Jun 2013. pp. 992-995 . (doi:10.1109/Transducers.2013.6626936).

Record type: Conference or Workshop Item (Paper)

Abstract

This paper reports on the fabrication and characterization of high-resolution strain sensors for steel based on Silicon On Insulator flexural resonators manufactured with chip-level LPCVD vacuum packaging. The sensors present high sensitivity (120 Hz/??), very high resolution (4 n?), low drift, and near-perfect reversibility in bending tests performed in both tensile and compressive strain regimes.

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More information

e-pub ahead of print date: June 2013
Venue - Dates: Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Transducers (Transducers & Eurosensors XXVII), Spain, 2013-06-16 - 2013-06-20
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 398789
URI: https://eprints.soton.ac.uk/id/eprint/398789
PURE UUID: 680f1a6c-af36-4add-bde8-d2774203f36e
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

Catalogue record

Date deposited: 02 Aug 2016 11:50
Last modified: 06 Jun 2018 12:20

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Contributors

Author: Luca Belsito
Author: Matteo Ferri
Author: Fulvio Mancarella
Author: Alberto Roncaglia
Author: Jize Yan ORCID iD
Author: A. Ashwin Seshia
Author: Kenichi Soga

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