Investigating vibration dynamics of cross-coupled MEMS resonators for reduced motional resistance

Erbes, Andreja, Thiruvenkatanathan, Pradyumna, Yan, Jize and Seshia, A Ashwin (2013) Investigating vibration dynamics of cross-coupled MEMS resonators for reduced motional resistance. In 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). IEEE. pp. 1711-1714 . (doi:10.1109/Transducers.2013.6627116).

Record type: Conference or Workshop Item (Paper)

Abstract

This paper investigates the vibration dynamics of a closed-chain, cross-coupled architecture of MEMS resonators. The system presented here is electrostatically transduced and operates at 1.04 MHz. Curve veering of the eigenvalue loci is used to experimentally quantify the coupling spring constants. Numerical simulations of the motional resistance variation against induced perturbation are used to assess the robustness of the cross-coupled system as opposed to equivalent traditional open-ended linear one-dimensional coupling scheme. Results show improvements of as much as 32% in the motional resistance between the cross-coupled system and its one-dimensional counterpart.

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e-pub ahead of print date: 2013

Venue - Dates: 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers & Eurosensors XXVII), Barcelona, Spain, 2013-06-16 - 2013-06-20

Organisations: Nanoelectronics and Nanotechnology