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Voltage programmable dual-band bandpass/bandstop filter response in a single micro-electro-mechanical device

Voltage programmable dual-band bandpass/bandstop filter response in a single micro-electro-mechanical device
Voltage programmable dual-band bandpass/bandstop filter response in a single micro-electro-mechanical device
This paper reports on a switchable multi-band filter response achieved within a single micro-electro-mechanical device. A prototype device fabricated in a SOI process demonstrates a voltage programmable and tunable, dual-band, band-pass/band-stop response. Both analytical and finite element models are introduced in this paper to elucidate the operating principle of the filter and to guide filter design. Voltage programmability of the filter characteristic is demonstrated with the ability to independently tune the centre frequency and bandwidth for each band. A representative measurement shows that the minimum 3 dB-bandwidth (BW) is 155 Hz, 140Hz, and 20 dB-BW is 216 Hz, 203Hz for the upper-band and lower-band center frequencies located at 131.5 kHz and 130.7 kHz, respectively.
836-839
Zou, Xudong
fd06193c-e337-4bea-b99d-2f304eaaeafc
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Zou, Xudong
fd06193c-e337-4bea-b99d-2f304eaaeafc
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e

Zou, Xudong, Yan, Jize and Seshia, A Ashwin (2011) Voltage programmable dual-band bandpass/bandstop filter response in a single micro-electro-mechanical device. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, China. 05 - 09 Jun 2011. pp. 836-839 . (doi:10.1109/TRANSDUCERS.2011.5969694).

Record type: Conference or Workshop Item (Paper)

Abstract

This paper reports on a switchable multi-band filter response achieved within a single micro-electro-mechanical device. A prototype device fabricated in a SOI process demonstrates a voltage programmable and tunable, dual-band, band-pass/band-stop response. Both analytical and finite element models are introduced in this paper to elucidate the operating principle of the filter and to guide filter design. Voltage programmability of the filter characteristic is demonstrated with the ability to independently tune the centre frequency and bandwidth for each band. A representative measurement shows that the minimum 3 dB-bandwidth (BW) is 155 Hz, 140Hz, and 20 dB-BW is 216 Hz, 203Hz for the upper-band and lower-band center frequencies located at 131.5 kHz and 130.7 kHz, respectively.

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More information

e-pub ahead of print date: 2011
Venue - Dates: 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, China, 2011-06-05 - 2011-06-09
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 398791
URI: https://eprints.soton.ac.uk/id/eprint/398791
PURE UUID: 26c58514-2d27-44ac-8f52-06b08d730a2b
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

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Date deposited: 04 Aug 2016 10:35
Last modified: 20 Jul 2019 00:34

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Contributors

Author: Xudong Zou
Author: Jize Yan ORCID iD
Author: A Ashwin Seshia

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