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Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors

Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors
Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors
A novel type of linear extensometer with exceptionally high resolution of 4 nm based on MEMS resonant strain sensors bonded on steel and operating in a vacuum package is presented. The tool is implemented by means of a steel thin bar that can be pre-stressed in tension within two fixing anchors. The extension of the bar is detected by using two vacuum-packaged resonant MEMS double-ended tuning fork (DETF) sensors bonded on the bar with epoxy glue, one of which is utilized for temperature compensation. Both sensors are driven by a closed loop self-oscillating transresistance amplifier feedback scheme implemented on a PCB (Printed Circuit Board). On the same board, a microcontroller-based frequency measurement circuit is also implemented, which is able to count the square wave fronts of the MEMS oscillator output with a resolution of 20 nsec. The system provides a frequency noise of 0.2 Hz corresponding to an extension resolution of 4 nm for the extensometer. Nearly perfect temperature compensation of the frequency output is achieved in the temperature range 20-35°C using the reference sensor.
1056-1059
Ferri, Matteo
42a2809c-1bb6-4c74-ab6b-c07b040691e0
Belsito, Luca
7493888b-85dd-4dea-9393-ff96454a861a
Mancarella, Fulvio
853a983e-aaec-45fc-8a63-ee05d3fc28c8
Masini, Luca
ba878d91-07db-4340-986a-3d70aa60e3af
Roncaglia, Alberto
b52a196f-c2f1-4b41-9dec-4f09f4059564
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Soga, Kenichi
e43028e3-af4d-4ea4-a747-6cc6dacc849b
Ferri, Matteo
42a2809c-1bb6-4c74-ab6b-c07b040691e0
Belsito, Luca
7493888b-85dd-4dea-9393-ff96454a861a
Mancarella, Fulvio
853a983e-aaec-45fc-8a63-ee05d3fc28c8
Masini, Luca
ba878d91-07db-4340-986a-3d70aa60e3af
Roncaglia, Alberto
b52a196f-c2f1-4b41-9dec-4f09f4059564
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Soga, Kenichi
e43028e3-af4d-4ea4-a747-6cc6dacc849b

Ferri, Matteo, Belsito, Luca, Mancarella, Fulvio, Masini, Luca, Roncaglia, Alberto, Yan, Jize, Seshia, A Ashwin and Soga, Kenichi (2011) Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors. Transducers 2011: 16th International Solid-State Sensors, Actuators and Microsystems Conference. 05 - 09 Jun 2011. pp. 1056-1059 . (doi:10.1109/TRANSDUCERS.2011.5969171).

Record type: Conference or Workshop Item (Paper)

Abstract

A novel type of linear extensometer with exceptionally high resolution of 4 nm based on MEMS resonant strain sensors bonded on steel and operating in a vacuum package is presented. The tool is implemented by means of a steel thin bar that can be pre-stressed in tension within two fixing anchors. The extension of the bar is detected by using two vacuum-packaged resonant MEMS double-ended tuning fork (DETF) sensors bonded on the bar with epoxy glue, one of which is utilized for temperature compensation. Both sensors are driven by a closed loop self-oscillating transresistance amplifier feedback scheme implemented on a PCB (Printed Circuit Board). On the same board, a microcontroller-based frequency measurement circuit is also implemented, which is able to count the square wave fronts of the MEMS oscillator output with a resolution of 20 nsec. The system provides a frequency noise of 0.2 Hz corresponding to an extension resolution of 4 nm for the extensometer. Nearly perfect temperature compensation of the frequency output is achieved in the temperature range 20-35°C using the reference sensor.

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More information

e-pub ahead of print date: 2011
Venue - Dates: Transducers 2011: 16th International Solid-State Sensors, Actuators and Microsystems Conference, 2011-06-05 - 2011-06-09
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 398792
URI: https://eprints.soton.ac.uk/id/eprint/398792
PURE UUID: 425ee2cb-6056-4c00-a220-c52920664ff3
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

Catalogue record

Date deposited: 03 Aug 2016 09:10
Last modified: 20 Jul 2019 00:34

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