The University of Southampton
University of Southampton Institutional Repository

Enhancing parametric sensitivity in electrically coupled MEMS resonators

Enhancing parametric sensitivity in electrically coupled MEMS resonators
Enhancing parametric sensitivity in electrically coupled MEMS resonators
We use vibration localization as a sensitive means of detecting small perturbations in stiffness in a pair of weakly coupled micromechanical resonators. For the first time, the variation in the eigenstates is studied by electrostatically coupling nearly identical resonators to allow for stronger localization of vibrational energy due to perturbations in stiffness. Eigenstate variations that are orders of magnitude greater than corresponding shifts in resonant frequency for an induced stiffness perturbation are experimentally demonstrated. Such high, voltage-tunable parametric sensitivities together with the added advantage of intrinsic common mode rejection pave the way to a new paradigm of mechanical sensing.
2350-2353
Thiruvenkatanathan, Pradyumna
42613b52-d83d-4fa9-bc40-337201dfa2a0
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Lee, Joshua
16c56789-d260-4a0f-a880-009135faf1d9
Seshia, A Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Thiruvenkatanathan, Pradyumna
42613b52-d83d-4fa9-bc40-337201dfa2a0
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Lee, Joshua
16c56789-d260-4a0f-a880-009135faf1d9
Seshia, A Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e

Thiruvenkatanathan, Pradyumna, Yan, Jize, Lee, Joshua and Seshia, A Ashwin (2009) Enhancing parametric sensitivity in electrically coupled MEMS resonators. Transducers 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, United States. 21 - 25 Jun 2009. pp. 2350-2353 . (doi:10.1109/SENSOR.2009.5285444).

Record type: Conference or Workshop Item (Paper)

Abstract

We use vibration localization as a sensitive means of detecting small perturbations in stiffness in a pair of weakly coupled micromechanical resonators. For the first time, the variation in the eigenstates is studied by electrostatically coupling nearly identical resonators to allow for stronger localization of vibrational energy due to perturbations in stiffness. Eigenstate variations that are orders of magnitude greater than corresponding shifts in resonant frequency for an induced stiffness perturbation are experimentally demonstrated. Such high, voltage-tunable parametric sensitivities together with the added advantage of intrinsic common mode rejection pave the way to a new paradigm of mechanical sensing.

Text
[18] trans 09 prad.pdf - Other
Download (679kB)

More information

e-pub ahead of print date: 2009
Venue - Dates: Transducers 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, United States, 2009-06-21 - 2009-06-25
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 398794
URI: https://eprints.soton.ac.uk/id/eprint/398794
PURE UUID: b4e15717-3445-43c4-a7e5-b2d08b43ec89
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

Catalogue record

Date deposited: 03 Aug 2016 10:35
Last modified: 17 Jul 2019 00:33

Export record

Altmetrics

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×