Enhanced transduction methods for electrostatically driven MEMS resonators

Lin, Angel T-H, Lee, Joshua, Yan, Jize and Seshia, A Ashiwn (2009) Enhanced transduction methods for electrostatically driven MEMS resonators. Transducers 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, Denver, United States. 21 - 25 Jun 2009. pp. 561-564 . (doi:10.1109/SENSOR.2009.5285386).

Record type: Conference or Workshop Item (Paper)

Abstract

Electrically addressed silicon bulk acoustic wave microresonators offer high Q solutions for applications in sensing and signal processing. However, the electrically transduced motional signal is often swamped by parasitic feedthrough in hybrid technologies. With the aim of enhancing the ratio of the motional to feedthrough current at nominal operating voltages, this paper benchmarks a variety of drive and detection principles for electrostatically driven square-extensional mode resonators operating in air and in a foundry MEMS process utilizing 2 µm gaps. A new detection technique, combining second harmonic capacitive actuation and piezoresistive detection, outperforms previously reported methods utilizing voltages as low as plusmn 3 V in air providing a promising solution for low voltage CMOS-MEMS integration.

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e-pub ahead of print date: 2009

Venue - Dates: Transducers 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, Denver, United States, 2009-06-21 - 2009-06-25

Organisations: Nanoelectronics and Nanotechnology