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Enhanced transduction methods for electrostatically driven MEMS resonators

Enhanced transduction methods for electrostatically driven MEMS resonators
Enhanced transduction methods for electrostatically driven MEMS resonators
Electrically addressed silicon bulk acoustic wave microresonators offer high Q solutions for applications in sensing and signal processing. However, the electrically transduced motional signal is often swamped by parasitic feedthrough in hybrid technologies. With the aim of enhancing the ratio of the motional to feedthrough current at nominal operating voltages, this paper benchmarks a variety of drive and detection principles for electrostatically driven square-extensional mode resonators operating in air and in a foundry MEMS process utilizing 2 mum gaps. A new detection technique, combining second harmonic capacitive actuation and piezoresistive detection, outperforms previously reported methods utilizing voltages as low as plusmn 3 V in air providing a promising solution for low voltage CMOS-MEMS integration.
561-564
Lin, Angel T-H
0358a271-4165-48d0-b0e6-aefad4057d94
Lee, Joshua
16c56789-d260-4a0f-a880-009135faf1d9
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A Ashiwn
3b0e72c1-9ae3-4df3-ad9b-2145322a3dc4
Lin, Angel T-H
0358a271-4165-48d0-b0e6-aefad4057d94
Lee, Joshua
16c56789-d260-4a0f-a880-009135faf1d9
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A Ashiwn
3b0e72c1-9ae3-4df3-ad9b-2145322a3dc4

Lin, Angel T-H, Lee, Joshua, Yan, Jize and Seshia, A Ashiwn (2009) Enhanced transduction methods for electrostatically driven MEMS resonators. Transducers 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, United States. 21 - 25 Jun 2009. pp. 561-564 . (doi:10.1109/SENSOR.2009.5285386).

Record type: Conference or Workshop Item (Paper)

Abstract

Electrically addressed silicon bulk acoustic wave microresonators offer high Q solutions for applications in sensing and signal processing. However, the electrically transduced motional signal is often swamped by parasitic feedthrough in hybrid technologies. With the aim of enhancing the ratio of the motional to feedthrough current at nominal operating voltages, this paper benchmarks a variety of drive and detection principles for electrostatically driven square-extensional mode resonators operating in air and in a foundry MEMS process utilizing 2 mum gaps. A new detection technique, combining second harmonic capacitive actuation and piezoresistive detection, outperforms previously reported methods utilizing voltages as low as plusmn 3 V in air providing a promising solution for low voltage CMOS-MEMS integration.

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More information

e-pub ahead of print date: 2009
Venue - Dates: Transducers 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, United States, 2009-06-21 - 2009-06-25
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 398796
URI: https://eprints.soton.ac.uk/id/eprint/398796
PURE UUID: 0b195fe5-016f-46b0-938a-9e55bbf30217
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

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Date deposited: 03 Aug 2016 10:10
Last modified: 01 Oct 2019 00:33

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