Electrostatically transduced face-shear mode silicon MEMS microresonator
Electrostatically transduced face-shear mode silicon MEMS microresonator
Silicon microresonators are increasingly viewed as attractive candidates for a variety of frequency selective signal processing applications due to miniaturization and potential for integration with CMOS. In this work, we present a new electrostatically transduced face-shear (FS) mode square plate single crystal silicon resonator that rivals previously reported bulk mode resonator topologies and demonstrates good frequency scaling. A microfabricated face-shear mode resonator with 800 ?m side length demonstrates a resonant frequency of 3.638 MHz, Q of 11193 in air and 836283 in vacuum as well as a TCF of -19ppm/K.
534-538
Lin, Angel
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Yan, Jize
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Seshia, A. Ashwin
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Lin, Angel
c6c02f5d-7005-4993-a6a7-453765c3fb4b
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A. Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Lin, Angel, Yan, Jize and Seshia, A. Ashwin
(2010)
Electrostatically transduced face-shear mode silicon MEMS microresonator.
2010 IEEE International Frequency Control Symposium (FCS).
01 - 04 Jun 2010.
.
(doi:10.1109/FREQ.2010.5556271).
Record type:
Conference or Workshop Item
(Paper)
Abstract
Silicon microresonators are increasingly viewed as attractive candidates for a variety of frequency selective signal processing applications due to miniaturization and potential for integration with CMOS. In this work, we present a new electrostatically transduced face-shear (FS) mode square plate single crystal silicon resonator that rivals previously reported bulk mode resonator topologies and demonstrates good frequency scaling. A microfabricated face-shear mode resonator with 800 ?m side length demonstrates a resonant frequency of 3.638 MHz, Q of 11193 in air and 836283 in vacuum as well as a TCF of -19ppm/K.
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[31] IFCS 10 Angel.pdf
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e-pub ahead of print date: June 2010
Venue - Dates:
2010 IEEE International Frequency Control Symposium (FCS), 2010-06-01 - 2010-06-04
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 398798
URI: http://eprints.soton.ac.uk/id/eprint/398798
PURE UUID: b4840ce4-1352-4073-9a14-f245872d1c6e
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Date deposited: 02 Aug 2016 12:32
Last modified: 15 Mar 2024 03:53
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Author:
Angel Lin
Author:
A. Ashwin Seshia
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