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Electrostatically transduced face-shear mode silicon MEMS microresonator

Electrostatically transduced face-shear mode silicon MEMS microresonator
Electrostatically transduced face-shear mode silicon MEMS microresonator
Silicon microresonators are increasingly viewed as attractive candidates for a variety of frequency selective signal processing applications due to miniaturization and potential for integration with CMOS. In this work, we present a new electrostatically transduced face-shear (FS) mode square plate single crystal silicon resonator that rivals previously reported bulk mode resonator topologies and demonstrates good frequency scaling. A microfabricated face-shear mode resonator with 800 ?m side length demonstrates a resonant frequency of 3.638 MHz, Q of 11193 in air and 836283 in vacuum as well as a TCF of -19ppm/K.
534-538
Lin, Angel
c6c02f5d-7005-4993-a6a7-453765c3fb4b
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A. Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Lin, Angel
c6c02f5d-7005-4993-a6a7-453765c3fb4b
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A. Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e

Lin, Angel, Yan, Jize and Seshia, A. Ashwin (2010) Electrostatically transduced face-shear mode silicon MEMS microresonator At 2010 IEEE International Frequency Control Symposium (FCS). 01 - 04 Jun 2010. , pp. 534-538.

Record type: Conference or Workshop Item (Paper)

Abstract

Silicon microresonators are increasingly viewed as attractive candidates for a variety of frequency selective signal processing applications due to miniaturization and potential for integration with CMOS. In this work, we present a new electrostatically transduced face-shear (FS) mode square plate single crystal silicon resonator that rivals previously reported bulk mode resonator topologies and demonstrates good frequency scaling. A microfabricated face-shear mode resonator with 800 ?m side length demonstrates a resonant frequency of 3.638 MHz, Q of 11193 in air and 836283 in vacuum as well as a TCF of -19ppm/K.

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e-pub ahead of print date: June 2010
Venue - Dates: 2010 IEEE International Frequency Control Symposium (FCS), 2010-06-01 - 2010-06-04
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 398798
URI: http://eprints.soton.ac.uk/id/eprint/398798
PURE UUID: b4840ce4-1352-4073-9a14-f245872d1c6e
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

Catalogue record

Date deposited: 02 Aug 2016 12:32
Last modified: 11 Nov 2017 04:45

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Contributors

Author: Angel Lin
Author: Jize Yan ORCID iD
Author: A. Ashwin Seshia

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