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Common mode rejection in electrically coupled MEMS resonators utilizing mode localization for sensor applications

Common mode rejection in electrically coupled MEMS resonators utilizing mode localization for sensor applications
Common mode rejection in electrically coupled MEMS resonators utilizing mode localization for sensor applications
Measuring shifts in eigenstates due to vibration localization in an array of weakly coupled resonators offer two distinct advantages for sensor applications as opposed to the technique of simply measuring resonant frequency shifts: (1) orders of magnitude enhancement in parametric sensitivity and (2) intrinsic common mode rejection. In this paper, we experimentally demonstrate the common mode rejection capabilities of such sensors. The vibration behavior is studied in pairs of nearly identical MEMS resonators that are electrically coupled, and subjected to small perturbations in stiffness under different ambient pressure and temperature. The shifts in the eigenstates for the same parametric perturbation in stiffness are experimentally demonstrated to be over three orders of magnitude greater than corresponding resonant frequency variations. They are also shown to remain relatively constant to variations in ambient temperature and pressure. This increased relative robustness to environmental drift, along with the advantage of ultra-high parametric sensitivity, opens the door to an alternative approach to achieving higher sensitivity and stability in micromechanical sensors.
358-362
Thiruvenkatanathan, Pradyumna
42613b52-d83d-4fa9-bc40-337201dfa2a0
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A. Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Thiruvenkatanathan, Pradyumna
42613b52-d83d-4fa9-bc40-337201dfa2a0
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A. Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e

Thiruvenkatanathan, Pradyumna, Yan, Jize and Seshia, A. Ashwin (2009) Common mode rejection in electrically coupled MEMS resonators utilizing mode localization for sensor applications. 2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time forum. 20 - 24 Apr 2009. pp. 358-362 . (doi:10.1109/FREQ.2009.5168201).

Record type: Conference or Workshop Item (Paper)

Abstract

Measuring shifts in eigenstates due to vibration localization in an array of weakly coupled resonators offer two distinct advantages for sensor applications as opposed to the technique of simply measuring resonant frequency shifts: (1) orders of magnitude enhancement in parametric sensitivity and (2) intrinsic common mode rejection. In this paper, we experimentally demonstrate the common mode rejection capabilities of such sensors. The vibration behavior is studied in pairs of nearly identical MEMS resonators that are electrically coupled, and subjected to small perturbations in stiffness under different ambient pressure and temperature. The shifts in the eigenstates for the same parametric perturbation in stiffness are experimentally demonstrated to be over three orders of magnitude greater than corresponding resonant frequency variations. They are also shown to remain relatively constant to variations in ambient temperature and pressure. This increased relative robustness to environmental drift, along with the advantage of ultra-high parametric sensitivity, opens the door to an alternative approach to achieving higher sensitivity and stability in micromechanical sensors.

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e-pub ahead of print date: April 2009
Venue - Dates: 2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time forum, 2009-04-20 - 2009-04-24
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 398801
URI: https://eprints.soton.ac.uk/id/eprint/398801
PURE UUID: 9dfdc9eb-0080-412d-b138-f954d662a1f2
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

Catalogue record

Date deposited: 02 Aug 2016 12:53
Last modified: 20 Jul 2019 00:34

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