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Suppression of parasitic resonance in piezoresistively transduced longitudinal mode MEMS resonators

Suppression of parasitic resonance in piezoresistively transduced longitudinal mode MEMS resonators
Suppression of parasitic resonance in piezoresistively transduced longitudinal mode MEMS resonators
This paper demonstrates the suppression of parasitic resonance in a piezoresistively transduced longitudinal mode MEMS resonator, wherein beams are electrostatically excited in a combined extensional mode with an associated frequency-Q product of 3.28 Ã? 1012. The response of the beam is sensed using both capacitive and piezoresistive transduction principles. The resonator consists of six parallel beams linked to a central anchor and a pair of symmetrical parallel beams that force the beams to vibrate in-phase. The mode suppression in the resonator is compared with other structures by finite element analysis (FEA). The relative distribution of strain energies in both the resonant structure and anchors and in both primary and secondary directions of vibration are proposed as figures of merit to compare this device to previously reported longitudinal mode beam resonators. The design optimization of longitudinal mode beam resonators is also discussed.
2149-2152
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Lin, Angel
c6c02f5d-7005-4993-a6a7-453765c3fb4b
Seshia, Ashwin
4389f1ed-603a-4fed-9ceb-6279102b0fad
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Lin, Angel
c6c02f5d-7005-4993-a6a7-453765c3fb4b
Seshia, Ashwin
4389f1ed-603a-4fed-9ceb-6279102b0fad

Yan, Jize, Lin, Angel and Seshia, Ashwin (2009) Suppression of parasitic resonance in piezoresistively transduced longitudinal mode MEMS resonators. 2009 IEEE International Ultrasonics Symposium, Italy. 20 - 23 Sep 2009. pp. 2149-2152 . (doi:10.1109/ULTSYM.2009.5441572).

Record type: Conference or Workshop Item (Paper)

Abstract

This paper demonstrates the suppression of parasitic resonance in a piezoresistively transduced longitudinal mode MEMS resonator, wherein beams are electrostatically excited in a combined extensional mode with an associated frequency-Q product of 3.28 Ã? 1012. The response of the beam is sensed using both capacitive and piezoresistive transduction principles. The resonator consists of six parallel beams linked to a central anchor and a pair of symmetrical parallel beams that force the beams to vibrate in-phase. The mode suppression in the resonator is compared with other structures by finite element analysis (FEA). The relative distribution of strain energies in both the resonant structure and anchors and in both primary and secondary directions of vibration are proposed as figures of merit to compare this device to previously reported longitudinal mode beam resonators. The design optimization of longitudinal mode beam resonators is also discussed.

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e-pub ahead of print date: 2009
Venue - Dates: 2009 IEEE International Ultrasonics Symposium, Italy, 2009-09-20 - 2009-09-23
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 398825
URI: https://eprints.soton.ac.uk/id/eprint/398825
PURE UUID: d1e1a66d-c7d1-489f-81ec-45b65668bb69
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

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Date deposited: 03 Aug 2016 10:59
Last modified: 20 Jul 2019 00:34

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