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Dynamic response of water droplet coated silicon MEMS resonators

Dynamic response of water droplet coated silicon MEMS resonators
Dynamic response of water droplet coated silicon MEMS resonators
This paper studies the dynamic response of silicon bulk acoustic mode resonators spotted with water droplets of varying volume on the top surface. Three different cases were compared: (i) bare silicon resonators, (ii) parylene C coated resonators and (iii) hydrophobic self assembled monolayer coated resonators. Experimentally derived variations in quality factor are compared with those obtained analytically for the electrostatically driven square extensional mode resonator. The measured quality factors showed a good agreement with the models.
669-672
Lin, Angel
c6c02f5d-7005-4993-a6a7-453765c3fb4b
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Lin, Angel
c6c02f5d-7005-4993-a6a7-453765c3fb4b
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e

Lin, Angel, Yan, Jize and Seshia, A Ashwin (2009) Dynamic response of water droplet coated silicon MEMS resonators. 2009 IEEE International Ultrasonics Symposium, Italy. 20 - 23 Sep 2009. pp. 669-672 . (doi:10.1109/ULTSYM.2009.5441588).

Record type: Conference or Workshop Item (Paper)

Abstract

This paper studies the dynamic response of silicon bulk acoustic mode resonators spotted with water droplets of varying volume on the top surface. Three different cases were compared: (i) bare silicon resonators, (ii) parylene C coated resonators and (iii) hydrophobic self assembled monolayer coated resonators. Experimentally derived variations in quality factor are compared with those obtained analytically for the electrostatically driven square extensional mode resonator. The measured quality factors showed a good agreement with the models.

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More information

e-pub ahead of print date: 2009
Venue - Dates: 2009 IEEE International Ultrasonics Symposium, Italy, 2009-09-20 - 2009-09-23
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 398826
URI: https://eprints.soton.ac.uk/id/eprint/398826
PURE UUID: c6bba19a-7919-46fe-9cfa-bc4332f53d8b
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

Catalogue record

Date deposited: 02 Aug 2016 12:35
Last modified: 20 Jul 2019 00:34

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