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Internal phase inversion narrow bandwidth MEMS filter

Internal phase inversion narrow bandwidth MEMS filter
Internal phase inversion narrow bandwidth MEMS filter
This paper reports a novel capacitively coupled twin beam resonator internal phase inversion filter fabricated in a SOI MEMS process. A narrow bandwidth of 0.0157% is demonstrated with a low control-voltage of -0.87 V. The bandwidth can be substantially reduced by utilizing an electrical coupling spring as opposed to a mechanical coupling-spring. The bandwidth is tunable with control achieved using a differential DC bias. A summary and comparison with other members of the phase inversion filter family is also included.
705-708
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Phan, Kim Le
69409db6-3c28-4e5b-a799-a44f4566298b
van Beek, Joost T-M
e98bccf5-feea-47aa-9854-ebc3db451da3
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Phan, Kim Le
69409db6-3c28-4e5b-a799-a44f4566298b
van Beek, Joost T-M
e98bccf5-feea-47aa-9854-ebc3db451da3

Yan, Jize, Seshia, A Ashwin, Phan, Kim Le and van Beek, Joost T-M (2008) Internal phase inversion narrow bandwidth MEMS filter. 2008 IEEE Ultrasonics Symposium. 02 - 05 Nov 2008. pp. 705-708 . (doi:10.1109/ULTSYM.2008.0168).

Record type: Conference or Workshop Item (Paper)

Abstract

This paper reports a novel capacitively coupled twin beam resonator internal phase inversion filter fabricated in a SOI MEMS process. A narrow bandwidth of 0.0157% is demonstrated with a low control-voltage of -0.87 V. The bandwidth can be substantially reduced by utilizing an electrical coupling spring as opposed to a mechanical coupling-spring. The bandwidth is tunable with control achieved using a differential DC bias. A summary and comparison with other members of the phase inversion filter family is also included.

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e-pub ahead of print date: 2008
Venue - Dates: 2008 IEEE Ultrasonics Symposium, 2008-11-02 - 2008-11-05
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 398829
URI: https://eprints.soton.ac.uk/id/eprint/398829
PURE UUID: ede98ed7-8fc2-4550-adfc-7137b140b7e9
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

Catalogue record

Date deposited: 03 Aug 2016 11:10
Last modified: 20 Jul 2019 00:34

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Contributors

Author: Jize Yan ORCID iD
Author: A Ashwin Seshia
Author: Kim Le Phan
Author: Joost T-M van Beek

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