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Anchor limited Q in flexural mode resonators

Anchor limited Q in flexural mode resonators
Anchor limited Q in flexural mode resonators
This paper reports a preliminary examination of the effect of anchor geometry design on the quality factor of flexural mode resonators operating in vacuum using both FE simulation and measurements of resonator frequency response. Three types of structures have been considered in this study: an elliptical mode ring, a double ended tuning fork, and a doubly-clamped beam. We consider the relative distribution of strain energies in both the resonant structure and the connecting stem, which is indicative of the measured quality factor. The measured quality factors of the different structures are compared against each other, based on which suggestions are proposed for optimizing the anchor limited quality factor (Q) in flexural mode micromechanical resonators.
2213-2216
Lee, Joshua
16c56789-d260-4a0f-a880-009135faf1d9
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A. Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Lee, Joshua
16c56789-d260-4a0f-a880-009135faf1d9
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A. Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e

Lee, Joshua, Yan, Jize and Seshia, A. Ashwin (2008) Anchor limited Q in flexural mode resonators. 2008 IEEE Ultrasonics Symposium (IUS 2008). 02 - 05 Nov 2008. pp. 2213-2216 . (doi:10.1109/ULTSYM.2008.0548).

Record type: Conference or Workshop Item (Paper)

Abstract

This paper reports a preliminary examination of the effect of anchor geometry design on the quality factor of flexural mode resonators operating in vacuum using both FE simulation and measurements of resonator frequency response. Three types of structures have been considered in this study: an elliptical mode ring, a double ended tuning fork, and a doubly-clamped beam. We consider the relative distribution of strain energies in both the resonant structure and the connecting stem, which is indicative of the measured quality factor. The measured quality factors of the different structures are compared against each other, based on which suggestions are proposed for optimizing the anchor limited quality factor (Q) in flexural mode micromechanical resonators.

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More information

e-pub ahead of print date: November 2008
Venue - Dates: 2008 IEEE Ultrasonics Symposium (IUS 2008), 2008-11-02 - 2008-11-05
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 398831
URI: https://eprints.soton.ac.uk/id/eprint/398831
PURE UUID: 5a8860eb-3c3e-42bc-ae49-d057283c8349
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

Catalogue record

Date deposited: 02 Aug 2016 12:29
Last modified: 19 Jul 2019 00:34

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