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Silicon nitride for integrated photonic applications

Silicon nitride for integrated photonic applications
Silicon nitride for integrated photonic applications
Due to its flexible optical properties silicon nitride is an attractive material for integrated photonic circuits. In this paper, we review the results we have obtained on near-infrared photonic devices including low loss waveguides based on SiN layers deposited with low temperature PECVD using an ammonia-free chemistry. In particular, we discuss the fabrication of subwavelength suspended structures to extend the use of SiN to mid-infrared photonic devices.
Domínguez Bucio, Thalía
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Al-Attili, Abdelrahman
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Debnath, Kapil
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Saito, Shin
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Mashanovich, Goran
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Sánchez-Postigo, Alejandro
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Wangüemert-Pérez, Gonzalo
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Ortega-Moñux, Alejandro
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Halir, Robert
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Cheben, Pavel
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Gardes, Frederic
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Domínguez Bucio, Thalía
83b57799-c566-473c-9b53-92e9c50b4287
Al-Attili, Abdelrahman
534a1c1f-3f8c-4a78-b71b-50c156e23373
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Saito, Shin
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Mashanovich, Goran
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Sánchez-Postigo, Alejandro
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Wangüemert-Pérez, Gonzalo
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Ortega-Moñux, Alejandro
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Halir, Robert
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Cheben, Pavel
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Gardes, Frederic
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Domínguez Bucio, Thalía, Al-Attili, Abdelrahman, Debnath, Kapil, Saito, Shin, Mashanovich, Goran, Sánchez-Postigo, Alejandro, Wangüemert-Pérez, Gonzalo, Ortega-Moñux, Alejandro, Halir, Robert, Cheben, Pavel and Gardes, Frederic (2016) Silicon nitride for integrated photonic applications. META'2016, the 7th International Conference on Metamaterials, Photonic Crystals and Plasmonics, Torremolinos, Spain. 25 - 28 Jul 2016. 1 pp .

Record type: Conference or Workshop Item (Other)

Abstract

Due to its flexible optical properties silicon nitride is an attractive material for integrated photonic circuits. In this paper, we review the results we have obtained on near-infrared photonic devices including low loss waveguides based on SiN layers deposited with low temperature PECVD using an ammonia-free chemistry. In particular, we discuss the fabrication of subwavelength suspended structures to extend the use of SiN to mid-infrared photonic devices.

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Silicon Nitride for Integrated Photonic Applications.pdf - Accepted Manuscript
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More information

e-pub ahead of print date: July 2016
Venue - Dates: META'2016, the 7th International Conference on Metamaterials, Photonic Crystals and Plasmonics, Torremolinos, Spain, 2016-07-25 - 2016-07-28
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 400416
URI: https://eprints.soton.ac.uk/id/eprint/400416
PURE UUID: 070f138f-cad8-42d1-9578-a8ca1fa8d1d0
ORCID for Thalía Domínguez Bucio: ORCID iD orcid.org/0000-0002-3664-1403
ORCID for Shin Saito: ORCID iD orcid.org/0000-0003-1539-1182

Catalogue record

Date deposited: 16 Sep 2016 09:14
Last modified: 19 Mar 2019 01:31

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Contributors

Author: Abdelrahman Al-Attili
Author: Kapil Debnath
Author: Shin Saito ORCID iD
Author: Alejandro Sánchez-Postigo
Author: Gonzalo Wangüemert-Pérez
Author: Alejandro Ortega-Moñux
Author: Robert Halir
Author: Pavel Cheben
Author: Frederic Gardes

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