Silicon nitride for integrated photonic applications
Silicon nitride for integrated photonic applications
Due to its flexible optical properties silicon nitride is an attractive material for integrated photonic circuits. In this paper, we review the results we have obtained on near-infrared photonic devices including low loss waveguides based on SiN layers deposited with low temperature PECVD using an ammonia-free chemistry. In particular, we discuss the fabrication of subwavelength suspended structures to extend the use of SiN to mid-infrared photonic devices.
Domínguez Bucio, Thalía
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Al-Attili, Abdelrahman
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Debnath, Kapil
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Saito, Shin
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Mashanovich, Goran
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Sánchez-Postigo, Alejandro
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Wangüemert-Pérez, Gonzalo
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Ortega-Moñux, Alejandro
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Halir, Robert
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Cheben, Pavel
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Gardes, Frederic
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Domínguez Bucio, Thalía
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Al-Attili, Abdelrahman
534a1c1f-3f8c-4a78-b71b-50c156e23373
Debnath, Kapil
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Saito, Shin
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Mashanovich, Goran
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Sánchez-Postigo, Alejandro
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Wangüemert-Pérez, Gonzalo
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Ortega-Moñux, Alejandro
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Halir, Robert
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Cheben, Pavel
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Gardes, Frederic
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Domínguez Bucio, Thalía, Al-Attili, Abdelrahman, Debnath, Kapil, Saito, Shin, Mashanovich, Goran, Sánchez-Postigo, Alejandro, Wangüemert-Pérez, Gonzalo, Ortega-Moñux, Alejandro, Halir, Robert, Cheben, Pavel and Gardes, Frederic
(2016)
Silicon nitride for integrated photonic applications.
META'2016, the 7th International Conference on Metamaterials, Photonic Crystals and Plasmonics, Convention & Exhibition Centre, Torremolinos, Spain.
25 - 28 Jul 2016.
1 pp
.
Record type:
Conference or Workshop Item
(Other)
Abstract
Due to its flexible optical properties silicon nitride is an attractive material for integrated photonic circuits. In this paper, we review the results we have obtained on near-infrared photonic devices including low loss waveguides based on SiN layers deposited with low temperature PECVD using an ammonia-free chemistry. In particular, we discuss the fabrication of subwavelength suspended structures to extend the use of SiN to mid-infrared photonic devices.
Text
Silicon Nitride for Integrated Photonic Applications.pdf
- Accepted Manuscript
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e-pub ahead of print date: July 2016
Venue - Dates:
META'2016, the 7th International Conference on Metamaterials, Photonic Crystals and Plasmonics, Convention & Exhibition Centre, Torremolinos, Spain, 2016-07-25 - 2016-07-28
Organisations:
Optoelectronics Research Centre
Identifiers
Local EPrints ID: 400416
URI: http://eprints.soton.ac.uk/id/eprint/400416
PURE UUID: 070f138f-cad8-42d1-9578-a8ca1fa8d1d0
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Date deposited: 16 Sep 2016 09:14
Last modified: 15 Mar 2024 04:02
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Contributors
Author:
Abdelrahman Al-Attili
Author:
Kapil Debnath
Author:
Shin Saito
Author:
Alejandro Sánchez-Postigo
Author:
Gonzalo Wangüemert-Pérez
Author:
Alejandro Ortega-Moñux
Author:
Robert Halir
Author:
Pavel Cheben
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