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Controlling stiction in nano-electro-mechanical systems using liquid crystals

Controlling stiction in nano-electro-mechanical systems using liquid crystals
Controlling stiction in nano-electro-mechanical systems using liquid crystals
Stiction is one of the major reliability issues limiting practical application of nano-electro-mechanical systems (NEMS), an emerging device technology that exploits mechanical movements on the scale of an integrated electronic circuit. We report on a discovery that stiction can be eliminated by infiltrating NEMS with nematic liquid crystals. We demonstrate this experimentally using a NEMS-based tuneable photonic metamaterial, where reliable switching of optical response was achieved for the entire range of nano-scopic structural displacements admitted by the metamaterial design. Being a more straightforward and easy-to-implement alternative to the existing anti-stiction solutions, our approach also introduces an active mechanism of stiction control, which enables toggling between stiction-free and the usual (stiction-limited) regimes of NEMS operation. It is expected to greatly expand the functionality of electro-mechanical devices and enable the development of adaptive and smart nano-systems.
1936-0851
1-8
Buchnev, Oleksandr
60cdb0d2-3388-47be-a066-61b3b396f69d
Podoliak, Nina
0908b951-00a7-48a5-bc82-631640910b9c
Frank, Thomas
3d1aae1b-7dd5-4ee3-8f06-c5a7f0acbe6f
Kaczmarek, Malgosia
408ec59b-8dba-41c1-89d0-af846d1bf327
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Fedotov, Vassili
3725f5cc-2d0b-4e61-95c5-26d187c84f25
Buchnev, Oleksandr
60cdb0d2-3388-47be-a066-61b3b396f69d
Podoliak, Nina
0908b951-00a7-48a5-bc82-631640910b9c
Frank, Thomas
3d1aae1b-7dd5-4ee3-8f06-c5a7f0acbe6f
Kaczmarek, Malgosia
408ec59b-8dba-41c1-89d0-af846d1bf327
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Fedotov, Vassili
3725f5cc-2d0b-4e61-95c5-26d187c84f25

Buchnev, Oleksandr, Podoliak, Nina, Frank, Thomas, Kaczmarek, Malgosia, Jiang, Liudi and Fedotov, Vassili (2016) Controlling stiction in nano-electro-mechanical systems using liquid crystals. ACS Nano, 1-8. (doi:10.1021/acsnano.6b07495).

Record type: Article

Abstract

Stiction is one of the major reliability issues limiting practical application of nano-electro-mechanical systems (NEMS), an emerging device technology that exploits mechanical movements on the scale of an integrated electronic circuit. We report on a discovery that stiction can be eliminated by infiltrating NEMS with nematic liquid crystals. We demonstrate this experimentally using a NEMS-based tuneable photonic metamaterial, where reliable switching of optical response was achieved for the entire range of nano-scopic structural displacements admitted by the metamaterial design. Being a more straightforward and easy-to-implement alternative to the existing anti-stiction solutions, our approach also introduces an active mechanism of stiction control, which enables toggling between stiction-free and the usual (stiction-limited) regimes of NEMS operation. It is expected to greatly expand the functionality of electro-mechanical devices and enable the development of adaptive and smart nano-systems.

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More information

Accepted/In Press date: 20 November 2016
e-pub ahead of print date: 21 November 2016
Organisations: Optoelectronics Research Centre, Quantum, Light & Matter Group

Identifiers

Local EPrints ID: 403126
URI: https://eprints.soton.ac.uk/id/eprint/403126
ISSN: 1936-0851
PURE UUID: d379da18-c7e4-4810-b86f-f7330e55f444
ORCID for Nina Podoliak: ORCID iD orcid.org/0000-0002-3146-0355
ORCID for Thomas Frank: ORCID iD orcid.org/0000-0003-4677-4055
ORCID for Liudi Jiang: ORCID iD orcid.org/0000-0002-3400-825X

Catalogue record

Date deposited: 24 Nov 2016 15:08
Last modified: 06 Oct 2018 04:12

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Contributors

Author: Oleksandr Buchnev
Author: Nina Podoliak ORCID iD
Author: Thomas Frank ORCID iD
Author: Liudi Jiang ORCID iD
Author: Vassili Fedotov

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