The University of Southampton
University of Southampton Institutional Repository

Low-loss silicon slot waveguide realized by surface roughness reduction

Low-loss silicon slot waveguide realized by surface roughness reduction
Low-loss silicon slot waveguide realized by surface roughness reduction
We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented to the <;11-2> direction on the Si (110) plane are fabricated by a combination of dry and wet etching to realize propagation loss of 4dB/cm for a waveguide with a slot width of 120nm.
IEEE
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shin
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shin
14a5d20b-055e-4f48-9dda-267e88bd3fdc

Debnath, Kapil, Khokhar, Ali, Reed, Graham and Saito, Shin (2016) Low-loss silicon slot waveguide realized by surface roughness reduction. In, 2016 IEEE 13th International Conference on Group IV photonics (GFP). (IEEE Conferences, , (doi:10.1109/GROUP4.2016.7739069)) 2016 IEEE 13th International Conference on Group IV Photonics (GFP) (26/08/16) Piscataway, US. IEEE. (doi:10.1109/GROUP4.2016.7739069).

Record type: Book Section

Abstract

We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented to the <;11-2> direction on the Si (110) plane are fabricated by a combination of dry and wet etching to realize propagation loss of 4dB/cm for a waveguide with a slot width of 120nm.

Text
SlottWg_G4P.pdf - Other
Restricted to Repository staff only
Request a copy

More information

Accepted/In Press date: 8 July 2016
Published date: 10 November 2016
Venue - Dates: 2016 IEEE 13th International Conference on Group IV Photonics (GFP), Shanghai, China, 2016-08-24 - 2016-08-26
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 403675
URI: https://eprints.soton.ac.uk/id/eprint/403675
PURE UUID: f65ad0a6-e09b-4889-aa07-70c50808eaef
ORCID for Shin Saito: ORCID iD orcid.org/0000-0003-1539-1182

Catalogue record

Date deposited: 08 Dec 2016 15:40
Last modified: 20 Jul 2019 00:41

Export record

Altmetrics

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×