Dataset for Helium Ion Beam Lithography on Fullerene Molecular Resists for Sub-10 nm Patterning

Shi, Xiaoqing, Prewett, Philip, Huq, Ejaz, Bagnall, Darren, Robinson, Alex and Boden, Stuart (2017) Dataset for Helium Ion Beam Lithography on Fullerene Molecular Resists for Sub-10 nm Patterning University of Southampton doi:10.5258/SOTON/404189 [Dataset]


[img] Other Shi_ME_2016_data_v2.xlsx - Dataset
Available under License Creative Commons Attribution.

Download (9kB)


Dataset supporting: Shi, Xiaoqing et al (2016) Helium ion beam lithography on fullerene molecular resists for sub-10 nm patterning. Microelectronic Engineering.Helium ion beam lithography (HIBL) is an emerging technique that uses a sub-nanometre focused beam of helium ions generated in the helium ion microscope to expose resist. It benefits from high resolution, high sensitivity and a low proximity effect. Here we present an investigation into HIBL on a novel, negative tone fullerene-derivative molecular resist. Analysis of large area exposures reveals a sensitivity of ~40 ?C/cm2 with a 30 keV helium beam which is almost three orders of magnitude higher than the sensitivity of this resist to a 30 keV electron beam. Sparse line features with line widths of 7.3 nm are achieved on the ~10 nm thick resist. The fabrication of 8.5 half-pitched lines with good feature separation and 6 nm half-pitched lines with inferior but still resolvable separation are also shown in this study. Thus, sub-10 nm patterning with small proximity effect is demonstrated using HIBL using standard processing conditions, establishing its potential as an alternative to EBL for rapid prototyping of beyond CMOS devices.

Item Type: Dataset
Digital Object Identifier (DOI): doi:10.5258/SOTON/404189
Related URLs:
Keywords: helium ion bean lithography, helium ion microscope, Fullerene, molecular resist, nanolithography, next-generation lithography
Subjects: Q Science > Q Science (General)
Organisations: Electronics & Computer Science, Nanoelectronics and Nanotechnology
ePrint ID: 404189
Date :
Date Event
Date Deposited: 17 Jan 2017 16:47
Last Modified: 09 Jun 2017 11:50
Single Nanometer Manufacturing for beyond CMOS devices (SNM)
Funded by: UNSPECIFIED (318804)
1 January 2013 to 31 December 2016
Further Information:Google Scholar

Actions (login required)

View Item View Item

Available Files

Visible to: Anyone
Content: Dataset
Description: UNSPECIFIED
Mime-Type: application/vnd.openxmlformats-officedocument.spreadsheetml.sheet