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RF MEMS zipping varactor with high quality factor and very large tuning range

RF MEMS zipping varactor with high quality factor and very large tuning range
RF MEMS zipping varactor with high quality factor and very large tuning range
An RF MEMS zipping analog varactor with a high-permittivity bismuth zinc niobate dielectric has been fabricated and characterized. The varactor can be continuously tuned from 10 to 280 fF, with a very large tuning range of 2700%. By use of gold electrodes to ensure a low series resistance, the high quality factors of 317 and 63 at 1 GHz were measured for the minimum and maximum capacitances, respectively. The self-resonance frequency of the varactor is estimated to be 16.6 GHz at the maximum capacitance and 87.6 GHz at the minimum capacitance. With a small device footprint of 540 × 130 ?m2, the zipping varactor is suitable for application in portable reconfigurable RF systems.
0741-3106
1340-1343
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Darbyshire, David
1507b23e-2b20-4e9e-841b-2e1496754685
Wright, Robert
8ceeb19f-432b-4b26-87a2-53837b9ed980
Kirby, Paul
40538b5c-7c3d-4838-97b1-14cdc0804d0c
Rotaru, Mihai
c53c5038-2fed-4ace-8fad-9f95d4c95b7e
Holmes, Andrew
1bd3433f-5a13-45ca-b1dc-794ee29ceb26
Yeatman, Eric
7b21b3fc-a815-4305-a75e-c1698ff6dbda
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Darbyshire, David
1507b23e-2b20-4e9e-841b-2e1496754685
Wright, Robert
8ceeb19f-432b-4b26-87a2-53837b9ed980
Kirby, Paul
40538b5c-7c3d-4838-97b1-14cdc0804d0c
Rotaru, Mihai
c53c5038-2fed-4ace-8fad-9f95d4c95b7e
Holmes, Andrew
1bd3433f-5a13-45ca-b1dc-794ee29ceb26
Yeatman, Eric
7b21b3fc-a815-4305-a75e-c1698ff6dbda

Pu, Suan-Hui, Darbyshire, David, Wright, Robert, Kirby, Paul, Rotaru, Mihai, Holmes, Andrew and Yeatman, Eric (2016) RF MEMS zipping varactor with high quality factor and very large tuning range. IEEE Electron Device Letters, 37 (10), 1340-1343. (doi:10.1109/LED.2016.2600264).

Record type: Article

Abstract

An RF MEMS zipping analog varactor with a high-permittivity bismuth zinc niobate dielectric has been fabricated and characterized. The varactor can be continuously tuned from 10 to 280 fF, with a very large tuning range of 2700%. By use of gold electrodes to ensure a low series resistance, the high quality factors of 317 and 63 at 1 GHz were measured for the minimum and maximum capacitances, respectively. The self-resonance frequency of the varactor is estimated to be 16.6 GHz at the maximum capacitance and 87.6 GHz at the minimum capacitance. With a small device footprint of 540 × 130 ?m2, the zipping varactor is suitable for application in portable reconfigurable RF systems.

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More information

Accepted/In Press date: 6 August 2016
e-pub ahead of print date: 15 August 2016
Published date: 1 October 2016
Organisations: Electronics & Computer Science, Engineering Science Unit

Identifiers

Local EPrints ID: 404961
URI: https://eprints.soton.ac.uk/id/eprint/404961
ISSN: 0741-3106
PURE UUID: 182f99dd-277a-4a61-a2c1-0563a6deaab5
ORCID for Suan-Hui Pu: ORCID iD orcid.org/0000-0002-3335-8880

Catalogue record

Date deposited: 25 Jan 2017 13:56
Last modified: 10 Dec 2019 01:23

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