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Laser annealing of low temperature deposited silicon waveguides

Laser annealing of low temperature deposited silicon waveguides
Laser annealing of low temperature deposited silicon waveguides
We report the fabrication of low temperature deposited polysilicon waveguides using a laser annealing process. Micro-Raman and XRD measurements reveal the quasi-single crystal-like quality of the material, which exhibits low optical losses of 5.13 dB/cm.
Optical Society of America
Franz, Yohann
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Runge, Antoine
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Oo, Swe
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Healy, Noel
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Martinez Jimenez, Gregorio
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Khokhar, Ali
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Tarazona, Antulio
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Chong, Harold
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Mailis, Sakellaris
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Peacock, Anna
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Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine
874cec37-209b-4c7a-97a5-56d05596dd2b
Oo, Swe
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Healy, Noel
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Martinez Jimenez, Gregorio
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Khokhar, Ali
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Tarazona, Antulio
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Chong, Harold
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Mailis, Sakellaris
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Peacock, Anna
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Franz, Yohann, Runge, Antoine, Oo, Swe, Healy, Noel, Martinez Jimenez, Gregorio, Khokhar, Ali, Tarazona, Antulio, Chong, Harold, Mailis, Sakellaris and Peacock, Anna (2017) Laser annealing of low temperature deposited silicon waveguides. In Conference on lasers and electro-optics. Optical Society of America. 2 pp . (doi:10.1364/CLEO_SI.2017.SM3K.4).

Record type: Conference or Workshop Item (Paper)

Abstract

We report the fabrication of low temperature deposited polysilicon waveguides using a laser annealing process. Micro-Raman and XRD measurements reveal the quasi-single crystal-like quality of the material, which exhibits low optical losses of 5.13 dB/cm.

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Yohann_Franz_CLEO-US_2017 - Accepted Manuscript
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Accepted/In Press date: 2 March 2017
e-pub ahead of print date: 19 May 2017
Published date: May 2017
Venue - Dates: CLEO: Science and Innovations 2017, San Jose, United States, 2017-05-14 - 2017-05-19
Organisations: Optoelectronics Research Centre, Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 406211
URI: https://eprints.soton.ac.uk/id/eprint/406211
PURE UUID: ca6f5cc6-3391-430a-b3fc-2815206c7395
ORCID for Harold Chong: ORCID iD orcid.org/0000-0002-7110-5761
ORCID for Sakellaris Mailis: ORCID iD orcid.org/0000-0001-8100-2670
ORCID for Anna Peacock: ORCID iD orcid.org/0000-0002-1940-7172

Catalogue record

Date deposited: 10 Mar 2017 10:42
Last modified: 11 Jul 2019 04:01

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Contributors

Author: Yohann Franz
Author: Antoine Runge
Author: Swe Oo
Author: Noel Healy
Author: Gregorio Martinez Jimenez
Author: Ali Khokhar
Author: Harold Chong ORCID iD
Author: Anna Peacock ORCID iD

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