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Laser annealing of low temperature deposited silicon waveguides

Laser annealing of low temperature deposited silicon waveguides
Laser annealing of low temperature deposited silicon waveguides
We report the fabrication of low temperature deposited polysilicon waveguides using a laser annealing process. Micro-Raman and XRD measurements reveal the quasi-single crystal-like quality of the material, which exhibits low optical losses of 5.13 dB/cm.
Optical Society of America
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine
874cec37-209b-4c7a-97a5-56d05596dd2b
Oo, Swe
6495f6da-8f17-4484-98fb-6151b4efbd9a
Healy, Noel
26eec85c-8d12-4f21-a67a-022f8dc2daab
Martinez Jimenez, Gregorio
6f3b34dd-33de-42b0-a69d-56e724da239b
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Tarazona, Antulio
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine
874cec37-209b-4c7a-97a5-56d05596dd2b
Oo, Swe
6495f6da-8f17-4484-98fb-6151b4efbd9a
Healy, Noel
26eec85c-8d12-4f21-a67a-022f8dc2daab
Martinez Jimenez, Gregorio
6f3b34dd-33de-42b0-a69d-56e724da239b
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Tarazona, Antulio
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc

Franz, Yohann, Runge, Antoine, Oo, Swe, Healy, Noel, Martinez Jimenez, Gregorio, Khokhar, Ali, Tarazona, Antulio, Chong, Harold, Mailis, Sakellaris and Peacock, Anna (2017) Laser annealing of low temperature deposited silicon waveguides. In Conference on lasers and electro-optics. Optical Society of America. 2 pp . (doi:10.1364/CLEO_SI.2017.SM3K.4).

Record type: Conference or Workshop Item (Paper)

Abstract

We report the fabrication of low temperature deposited polysilicon waveguides using a laser annealing process. Micro-Raman and XRD measurements reveal the quasi-single crystal-like quality of the material, which exhibits low optical losses of 5.13 dB/cm.

Text
Yohann_Franz_CLEO-US_2017 - Accepted Manuscript
Available under License University of Southampton Accepted Manuscript Licence.
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More information

Accepted/In Press date: 2 March 2017
e-pub ahead of print date: 19 May 2017
Published date: May 2017
Venue - Dates: CLEO: Science and Innovations 2017, , San Jose, United States, 2017-05-14 - 2017-05-19
Organisations: Optoelectronics Research Centre, Nanoelectronics and Nanotechnology
Learn more about Optoelectronics Research Centre research

Identifiers

Local EPrints ID: 406211
URI: http://eprints.soton.ac.uk/id/eprint/406211
DOI: doi:10.1364/CLEO_SI.2017.SM3K.4
PURE UUID: ca6f5cc6-3391-430a-b3fc-2815206c7395
ORCID for Harold Chong: ORCID iD orcid.org/0000-0002-7110-5761
ORCID for Sakellaris Mailis: ORCID iD orcid.org/0000-0001-8100-2670
ORCID for Anna Peacock: ORCID iD orcid.org/0000-0002-1940-7172

Catalogue record

Date deposited: 10 Mar 2017 10:42
Last modified: 22 Nov 2021 05:11

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Contributors

Author: Yohann Franz
Author: Antoine Runge
Author: Swe Oo
Author: Noel Healy
Author: Gregorio Martinez Jimenez
Author: Ali Khokhar
Author: Antulio Tarazona
Author: Harold Chong ORCID iD
Author: Sakellaris Mailis ORCID iD
Author: Anna Peacock ORCID iD

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