Coherent diffractive imaging with a laboratory-scale, gas-discharge plasma extreme ultraviolet light source

Bussman, Jan, Odstrčil, Michal, Bresenitz, R., Rudolf, D., Miao, Jianwei, Brocklesby, William and Juschkin, Larissa (2016) Coherent diffractive imaging with a laboratory-scale, gas-discharge plasma extreme ultraviolet light source. 14th International Conference on X-Ray Lasers, Colorado State University, Fort Collins, United States. 26 - 30 May 2014. pp. 275-280 . (doi:10.1007/978-3-319-19521-6_36).

Abstract

Coherent diffractive imaging (CDI) and related techniques enable a new type of diffraction-limited high resolution microscopy and have been widely used in the extreme ultraviolet (EUV) and X-ray communities. In this experiment, we demonstrate CDI using a compact gas-discharge EUV light source with a wavelength of 17.3 nm (oxygen VI emission). Our image reconstruction method accounts for the partial spatial coherence of the radiation using a deconvolution technique. Our results are promising for future laboratory-scale CDI applications, including mask inspection for EUV lithography and EUV metrology.

These proceedings comprise invited and contributed papers presented at the 14th International Conference on X-Ray Lasers (ICXRL 2014). This conference is part of a continuing series dedicated to recent developments and applications of x-ray lasers and other coherent x-ray sources with attention to supporting technologies and instrumentation. New results in the generation of intense, coherent x-rays and progress toward practical devices and their applications in numerous fields are reported. Areas of research in plasma-based x-ray lasers, 4th generation accelerator-based sources and higher harmonic generation, and other x-ray generation schemes are covered. The scope of ICXRL 2014 included, but was not limited to: Laser-pumped X-ray lasers Discharge excitation and other X-ray laser pumping methods Injection/seeding of X-ray amplifiers New lasing transitions and novel X-ray laser schemes High Harmonic sources-Free-electron laser generation in the XUV and X-ray range Novel schemes for coherent XUV and X-ray generation XUV and X-ray optics and metrology-Driving laser technology Theory and modeling of X-ray gain medium and beam characteristics Applications of high brightness and ultrashort X-ray sources.

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Contributors

Author: William Brocklesby

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