The University of Southampton
University of Southampton Institutional Repository

Coherent diffractive imaging with a laboratory-scale, gas-discharge plasma extreme ultraviolet light source

Coherent diffractive imaging with a laboratory-scale, gas-discharge plasma extreme ultraviolet light source
Coherent diffractive imaging with a laboratory-scale, gas-discharge plasma extreme ultraviolet light source
Coherent diffractive imaging (CDI) and related techniques enable a new type of diffraction-limited high resolution microscopy and have been widely used in the extreme ultraviolet (EUV) and X-ray communities. In this experiment, we demonstrate CDI using a compact gas-discharge EUV light source with a wavelength of 17.3 nm (oxygen VI emission). Our image reconstruction method accounts for the partial spatial coherence of the radiation using a deconvolution technique. Our results are promising for future laboratory-scale CDI applications, including mask inspection for EUV lithography and EUV metrology.

These proceedings comprise invited and contributed papers presented at the 14th International Conference on X-Ray Lasers (ICXRL 2014). This conference is part of a continuing series dedicated to recent developments and applications of x-ray lasers and other coherent x-ray sources with attention to supporting technologies and instrumentation. New results in the generation of intense, coherent x-rays and progress toward practical devices and their applications in numerous fields are reported. Areas of research in plasma-based x-ray lasers, 4th generation accelerator-based sources and higher harmonic generation, and other x-ray generation schemes are covered. The scope of ICXRL 2014 included, but was not limited to: Laser-pumped X-ray lasers Discharge excitation and other X-ray laser pumping methods Injection/seeding of X-ray amplifiers New lasing transitions and novel X-ray laser schemes High Harmonic sources-Free-electron laser generation in the XUV and X-ray range Novel schemes for coherent XUV and X-ray generation XUV and X-ray optics and metrology-Driving laser technology Theory and modeling of X-ray gain medium and beam characteristics Applications of high brightness and ultrashort X-ray sources.
275-280
Bussman, Jan
700f2ddc-cb81-4a25-a138-5c372138733e
Odstrčil, Michal
b297d3ec-ed42-4709-9f90-7af79d0644c7
Bresenitz, R.
737a9c51-52f5-470d-a428-5f1cb383f3a6
Rudolf, D.
f73b65ea-7f94-4608-932b-29e2f734648b
Miao, Jianwei
ad0364fc-5612-4050-b6ea-eedbb7b98f72
Brocklesby, William
c53ca2f6-db65-4e19-ad00-eebeb2e6de67
Juschkin, Larissa
5c7e1507-20c3-45a7-826a-82f1e31fd146
Bussman, Jan
700f2ddc-cb81-4a25-a138-5c372138733e
Odstrčil, Michal
b297d3ec-ed42-4709-9f90-7af79d0644c7
Bresenitz, R.
737a9c51-52f5-470d-a428-5f1cb383f3a6
Rudolf, D.
f73b65ea-7f94-4608-932b-29e2f734648b
Miao, Jianwei
ad0364fc-5612-4050-b6ea-eedbb7b98f72
Brocklesby, William
c53ca2f6-db65-4e19-ad00-eebeb2e6de67
Juschkin, Larissa
5c7e1507-20c3-45a7-826a-82f1e31fd146

Bussman, Jan, Odstrčil, Michal, Bresenitz, R., Rudolf, D., Miao, Jianwei, Brocklesby, William and Juschkin, Larissa (2016) Coherent diffractive imaging with a laboratory-scale, gas-discharge plasma extreme ultraviolet light source. 14th International Conference on X-Ray Lasers, Fort Collins, United States. 26 - 30 May 2014. pp. 275-280 . (doi:10.1007/978-3-319-19521-6_36).

Record type: Conference or Workshop Item (Paper)

Abstract

Coherent diffractive imaging (CDI) and related techniques enable a new type of diffraction-limited high resolution microscopy and have been widely used in the extreme ultraviolet (EUV) and X-ray communities. In this experiment, we demonstrate CDI using a compact gas-discharge EUV light source with a wavelength of 17.3 nm (oxygen VI emission). Our image reconstruction method accounts for the partial spatial coherence of the radiation using a deconvolution technique. Our results are promising for future laboratory-scale CDI applications, including mask inspection for EUV lithography and EUV metrology.

These proceedings comprise invited and contributed papers presented at the 14th International Conference on X-Ray Lasers (ICXRL 2014). This conference is part of a continuing series dedicated to recent developments and applications of x-ray lasers and other coherent x-ray sources with attention to supporting technologies and instrumentation. New results in the generation of intense, coherent x-rays and progress toward practical devices and their applications in numerous fields are reported. Areas of research in plasma-based x-ray lasers, 4th generation accelerator-based sources and higher harmonic generation, and other x-ray generation schemes are covered. The scope of ICXRL 2014 included, but was not limited to: Laser-pumped X-ray lasers Discharge excitation and other X-ray laser pumping methods Injection/seeding of X-ray amplifiers New lasing transitions and novel X-ray laser schemes High Harmonic sources-Free-electron laser generation in the XUV and X-ray range Novel schemes for coherent XUV and X-ray generation XUV and X-ray optics and metrology-Driving laser technology Theory and modeling of X-ray gain medium and beam characteristics Applications of high brightness and ultrashort X-ray sources.

Full text not available from this repository.

More information

e-pub ahead of print date: 20 September 2015
Published date: 2016
Venue - Dates: 14th International Conference on X-Ray Lasers, Fort Collins, United States, 2014-05-26 - 2014-05-30
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 406664
URI: http://eprints.soton.ac.uk/id/eprint/406664
PURE UUID: 12a25393-37bf-4692-8543-fa2acf1e87b9
ORCID for William Brocklesby: ORCID iD orcid.org/0000-0002-2123-6712

Catalogue record

Date deposited: 18 Mar 2017 02:28
Last modified: 26 Oct 2019 00:39

Export record

Altmetrics

Contributors

Author: Jan Bussman
Author: Michal Odstrčil
Author: R. Bresenitz
Author: D. Rudolf
Author: Jianwei Miao
Author: Larissa Juschkin

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×