Wang, Qian, Yuan, Guanghui, Kiang, Kian, Sun, Kai, Gholipour, Behrad, Rogers, Edward, Huang, K., Ang, S.S., Zheludev, Nikolai and Teng, Jinghua (2017) Dataset for Reconfigurable phase-change photomask for grayscale photolithography. University of Southampton doi:10.5258/SOTON/D0084 [Dataset]
Record type:
Dataset
Abstract
Data set to support: Wang, Q. et al (2017). Reconfigurable phase-change photomask for grayscale photolithography, Applied Physics Letters
Archive
Dataset_20170605.zip
- Dataset
Available under License Creative Commons Attribution.
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More information
Published date: 2017
Organisations:
Nanoelectronics and Nanotechnology, ORC Research, Optoelectronics Research Centre
Identifiers
Local EPrints ID: 408231
URI: http://eprints.soton.ac.uk/id/eprint/408231
PURE UUID: b498f527-d314-4930-a009-9a585cf3a579
Catalogue record
Date deposited: 17 May 2017 04:03
Last modified: 05 Nov 2023 02:39
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Contributors
Creator:
Qian Wang
Creator:
Guanghui Yuan
Creator:
Kai Sun
Creator:
Behrad Gholipour
Creator:
Edward Rogers
Creator:
K. Huang
Creator:
S.S. Ang
Creator:
Jinghua Teng
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