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Dataset for Reconfigurable phase-change photomask for grayscale photolithography

Dataset for Reconfigurable phase-change photomask for grayscale photolithography
Dataset for Reconfigurable phase-change photomask for grayscale photolithography
Data set to support: Wang, Q. et al (2017). Reconfigurable phase-change photomask for grayscale photolithography, Applied Physics Letters
University of Southampton
Wang, Qian
a9a64412-49cc-4ab7-9bb6-646551219d66
Yuan, Guanghui
d7af6f06-7da9-41ef-b7f9-cfe09e55fcaa
Kiang, Kian
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Gholipour, Behrad
c17bd62d-9df6-40e6-bc42-65272d97e559
Rogers, Edward
b92cc8ab-0d91-4b2e-b5c7-8a2f490a36a2
Huang, K.
e8214e9c-967a-4e7f-b515-489f5250cc35
Ang, S.S.
b840b858-a06d-43d8-8e3e-3de140a496cb
Zheludev, Nikolai
32fb6af7-97e4-4d11-bca6-805745e40cc6
Teng, Jinghua
f47107ab-c320-4326-a8fe-45d9113f257a
Wang, Qian
a9a64412-49cc-4ab7-9bb6-646551219d66
Yuan, Guanghui
d7af6f06-7da9-41ef-b7f9-cfe09e55fcaa
Kiang, Kian
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Gholipour, Behrad
c17bd62d-9df6-40e6-bc42-65272d97e559
Rogers, Edward
b92cc8ab-0d91-4b2e-b5c7-8a2f490a36a2
Huang, K.
e8214e9c-967a-4e7f-b515-489f5250cc35
Ang, S.S.
b840b858-a06d-43d8-8e3e-3de140a496cb
Zheludev, Nikolai
32fb6af7-97e4-4d11-bca6-805745e40cc6
Teng, Jinghua
f47107ab-c320-4326-a8fe-45d9113f257a

Wang, Qian, Yuan, Guanghui, Kiang, Kian, Sun, Kai, Gholipour, Behrad, Rogers, Edward, Huang, K., Ang, S.S., Zheludev, Nikolai and Teng, Jinghua (2017) Dataset for Reconfigurable phase-change photomask for grayscale photolithography. University of Southampton doi:10.5258/SOTON/D0084 [Dataset]

Record type: Dataset

Abstract

Data set to support: Wang, Q. et al (2017). Reconfigurable phase-change photomask for grayscale photolithography, Applied Physics Letters

Archive
Dataset_20170605.zip - Dataset
Available under License Creative Commons Attribution.
Download (779kB)

More information

Published date: 2017
Organisations: Nanoelectronics and Nanotechnology, ORC Research, Optoelectronics Research Centre

Identifiers

Local EPrints ID: 408231
URI: http://eprints.soton.ac.uk/id/eprint/408231
PURE UUID: b498f527-d314-4930-a009-9a585cf3a579
ORCID for Kian Kiang: ORCID iD orcid.org/0000-0002-7326-909X
ORCID for Nikolai Zheludev: ORCID iD orcid.org/0000-0002-1013-6636

Catalogue record

Date deposited: 17 May 2017 04:03
Last modified: 30 Sep 2021 01:40

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Contributors

Creator: Qian Wang
Creator: Guanghui Yuan
Creator: Kian Kiang ORCID iD
Creator: Kai Sun
Creator: Behrad Gholipour
Creator: Edward Rogers
Creator: K. Huang
Creator: S.S. Ang
Creator: Nikolai Zheludev ORCID iD
Creator: Jinghua Teng

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