Introduction to imaging techniques in the HIM
Introduction to imaging techniques in the HIM
The helium ion microscope (HIM), as the name implies, is primarily an imaging tool. This chapter serves as an introduction to imaging with the HIM and explores the various ways this is implemented by first describing the numerous imaging signals and contrast mechanisms available and then giving an overview of some practical HIM imaging techniques. Several examples from the literature are used to illustrate the important imaging modes including high resolution secondary electron imaging, backscattered ion imaging, ionoluminescence imaging and imaging with transmitted or reflected ions. Key concepts such as ion channeling, charge neutralization and utilizing the large depth of field are introduced, setting the scene for the subsequent chapters in this section that focus on particular aspects of HIM imaging.
149-172
Boden, Stuart
83976b65-e90f-42d1-9a01-fe9cfc571bf8
2016
Boden, Stuart
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Boden, Stuart
(2016)
Introduction to imaging techniques in the HIM.
In,
Hlawacek, Gregor and Golzhauser, Armin
(eds.)
Helium Ion Microscopy.
(NanoScience and Technology, 1)
1 ed.
Switzerland.
Springer, .
(doi:10.1007/978-3-319-41990-9).
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Abstract
The helium ion microscope (HIM), as the name implies, is primarily an imaging tool. This chapter serves as an introduction to imaging with the HIM and explores the various ways this is implemented by first describing the numerous imaging signals and contrast mechanisms available and then giving an overview of some practical HIM imaging techniques. Several examples from the literature are used to illustrate the important imaging modes including high resolution secondary electron imaging, backscattered ion imaging, ionoluminescence imaging and imaging with transmitted or reflected ions. Key concepts such as ion channeling, charge neutralization and utilizing the large depth of field are introduced, setting the scene for the subsequent chapters in this section that focus on particular aspects of HIM imaging.
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Published date: 2016
Additional Information:
Chapter 6
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 408534
URI: http://eprints.soton.ac.uk/id/eprint/408534
ISSN: 1434-4904
PURE UUID: 0cd78306-a6e6-4186-8b87-8efed9ba6537
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Date deposited: 23 May 2017 04:01
Last modified: 16 Mar 2024 03:42
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Contributors
Author:
Stuart Boden
Editor:
Gregor Hlawacek
Editor:
Armin Golzhauser
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