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Introduction to imaging techniques in the HIM

Introduction to imaging techniques in the HIM
Introduction to imaging techniques in the HIM
The helium ion microscope (HIM), as the name implies, is primarily an imaging tool. This chapter serves as an introduction to imaging with the HIM and explores the various ways this is implemented by first describing the numerous imaging signals and contrast mechanisms available and then giving an overview of some practical HIM imaging techniques. Several examples from the literature are used to illustrate the important imaging modes including high resolution secondary electron imaging, backscattered ion imaging, ionoluminescence imaging and imaging with transmitted or reflected ions. Key concepts such as ion channeling, charge neutralization and utilizing the large depth of field are introduced, setting the scene for the subsequent chapters in this section that focus on particular aspects of HIM imaging.
1434-4904
149-172
Springer
Boden, Stuart
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Hlawacek, Gregor
Golzhauser, Armin
Boden, Stuart
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Hlawacek, Gregor
Golzhauser, Armin

Boden, Stuart (2016) Introduction to imaging techniques in the HIM. In, Hlawacek, Gregor and Golzhauser, Armin (eds.) Helium Ion Microscopy. (NanoScience and Technology, , (doi:10.1007/978-3-319-41990-9), 1) 1 ed. Switzerland. Springer, pp. 149-172. (doi:10.1007/978-3-319-41990-9).

Record type: Book Section

Abstract

The helium ion microscope (HIM), as the name implies, is primarily an imaging tool. This chapter serves as an introduction to imaging with the HIM and explores the various ways this is implemented by first describing the numerous imaging signals and contrast mechanisms available and then giving an overview of some practical HIM imaging techniques. Several examples from the literature are used to illustrate the important imaging modes including high resolution secondary electron imaging, backscattered ion imaging, ionoluminescence imaging and imaging with transmitted or reflected ions. Key concepts such as ion channeling, charge neutralization and utilizing the large depth of field are introduced, setting the scene for the subsequent chapters in this section that focus on particular aspects of HIM imaging.

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Published date: 2016
Additional Information: Chapter 6
Organisations: Nanoelectronics and Nanotechnology

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Local EPrints ID: 408534
URI: https://eprints.soton.ac.uk/id/eprint/408534
ISSN: 1434-4904
PURE UUID: 0cd78306-a6e6-4186-8b87-8efed9ba6537
ORCID for Stuart Boden: ORCID iD orcid.org/0000-0002-4232-1828

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Date deposited: 23 May 2017 04:01
Last modified: 15 Aug 2019 00:44

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