Planarised optical fiber composite using flame hydrolysis deposition demonstrating an integrated FBG anemometer
Planarised optical fiber composite using flame hydrolysis deposition demonstrating an integrated FBG anemometer
This paper reports for the first time a planarised optical fiber composite formed using Flame Hydrolysis Deposition (FHD). As a way of format demonstration a Micro-Opto-Electro-Mechanical (MOEMS) hot wire anemometer is formed using micro-fabrication processing. The planarised device is rigidly secured to a silicon wafer using optical quality doped silica that has been deposited using flame hydrolysis and consolidated at high temperature. The resulting structure can withstand temperatures exceeding 580K and is sensitive enough to resolve free and forced convection interactions at low fluid velocity.
32150-32157
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
29 December 2014
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Holmes, Christopher, Gates, James C. and Smith, Peter G.R.
(2014)
Planarised optical fiber composite using flame hydrolysis deposition demonstrating an integrated FBG anemometer.
Optics Express, 22 (26), .
(doi:10.1364/OE.22.032150).
Abstract
This paper reports for the first time a planarised optical fiber composite formed using Flame Hydrolysis Deposition (FHD). As a way of format demonstration a Micro-Opto-Electro-Mechanical (MOEMS) hot wire anemometer is formed using micro-fabrication processing. The planarised device is rigidly secured to a silicon wafer using optical quality doped silica that has been deposited using flame hydrolysis and consolidated at high temperature. The resulting structure can withstand temperatures exceeding 580K and is sensitive enough to resolve free and forced convection interactions at low fluid velocity.
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oe-22-26-32150
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More information
Accepted/In Press date: 9 December 2014
e-pub ahead of print date: 19 December 2014
Published date: 29 December 2014
Organisations:
Optoelectronics Research Centre, Photonic Systems Circuits & Sensors
Identifiers
Local EPrints ID: 408839
URI: http://eprints.soton.ac.uk/id/eprint/408839
ISSN: 1094-4087
PURE UUID: 48ed4e8e-d5c3-4de0-8e17-895a3468f0d1
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Date deposited: 28 May 2017 04:03
Last modified: 16 Mar 2024 03:52
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Contributors
Author:
James C. Gates
Author:
Peter G.R. Smith
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