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Deflection amplification mechanism in a capacitive accelerometer

Deflection amplification mechanism in a capacitive accelerometer
Deflection amplification mechanism in a capacitive accelerometer
1096-1099
Zeimpekis, Ioannis
a2c354ec-3891-497c-adac-89b3a5d96af0
Sari, Ibrahim
cdcb1265-4a94-4c5a-b8b1-f1ca7e6759d7
Kraft, Michael
c2ff2439-b909-4af3-824d-9d7c0d14dc3e
Zeimpekis, Ioannis
a2c354ec-3891-497c-adac-89b3a5d96af0
Sari, Ibrahim
cdcb1265-4a94-4c5a-b8b1-f1ca7e6759d7
Kraft, Michael
c2ff2439-b909-4af3-824d-9d7c0d14dc3e

Zeimpekis, Ioannis, Sari, Ibrahim and Kraft, Michael (2011) Deflection amplification mechanism in a capacitive accelerometer. pp. 1096-1099 .

Record type: Conference or Workshop Item (Paper)

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More information

Published date: 1 June 2011
Organisations: Optoelectronics Research Centre, Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 409583
URI: https://eprints.soton.ac.uk/id/eprint/409583
PURE UUID: aefa00c7-2256-4019-90d3-acebe486814e

Catalogue record

Date deposited: 31 May 2017 04:01
Last modified: 13 Mar 2019 19:51

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