Illustration of the industrial readiness of hot wire chemical vapor deposition (HWCVD) as part of standard micro-fabrication and high spec nanofabrication production lines

Tarazona, Antulio, de Leon, Maria Theresa, Grech, David, Zeimpekis, Ioannis, Sun, Kai, Chong, Harold and Ashburn, Peter (2014) Illustration of the industrial readiness of hot wire chemical vapor deposition (HWCVD) as part of standard micro-fabrication and high spec nanofabrication production lines.

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Published date: 1 October 2014

Organisations: Optoelectronics Research Centre, Electronics & Computer Science, Nanoelectronics and Nanotechnology

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Local EPrints ID: 410227

URI: http://eprints.soton.ac.uk/id/eprint/410227

PURE UUID: 61ee3a11-cd17-460d-9a5f-3d0dda2999e4

ORCID for Ioannis Zeimpekis:

orcid.org/0000-0002-7455-1599

ORCID for Kai Sun:

orcid.org/0000-0001-6807-6253

ORCID for Harold Chong:

orcid.org/0000-0002-7110-5761

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Date deposited: 06 Jun 2017 04:02

Last modified: 21 Sep 2024 01:46

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Contributors

Author: Antulio Tarazona

Author: Maria Theresa de Leon

Author: David Grech

Author: Ioannis Zeimpekis

Author: Kai Sun

Author: Harold Chong

Author: Peter Ashburn

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