Tarazona, Antulio, de Leon, Maria Theresa, Grech, David, Zeimpekis, Ioannis, Sun, Kai, Chong, Harold and Ashburn, Peter (2014) Illustration of the industrial readiness of hot wire chemical vapor deposition (HWCVD) as part of standard micro-fabrication and high spec nanofabrication production lines.
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Conference or Workshop Item
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Published date: 1 October 2014
Organisations:
Optoelectronics Research Centre, Electronics & Computer Science, Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 410227
URI: https://eprints.soton.ac.uk/id/eprint/410227
PURE UUID: 61ee3a11-cd17-460d-9a5f-3d0dda2999e4
Catalogue record
Date deposited: 06 Jun 2017 04:02
Last modified: 14 Mar 2019 01:39
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Contributors
Author:
Antulio Tarazona
Author:
Maria Theresa de Leon
Author:
David Grech
Author:
Ioannis Zeimpekis
Author:
Kai Sun
Author:
Peter Ashburn
University divisions
- Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Electronics & Computer Science (pre 2018 reorg) > Nanoelectronics and Nanotechnology (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) > Nanoelectronics and Nanotechnology (pre 2018 reorg)
School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) > Nanoelectronics and Nanotechnology (pre 2018 reorg) - Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Electronics & Computer Science (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg)
School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) - Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Optoelectronics Research Centre (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics > Optoelectronics Research Centre (pre 2018 reorg)
Zepler Institute for Photonics and Nanoelectronics > Optoelectronics Research Centre (pre 2018 reorg)
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