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Illustration of the industrial readiness of hot wire chemical vapor deposition (HWCVD) as part of standard micro-fabrication and high spec nanofabrication production lines

Illustration of the industrial readiness of hot wire chemical vapor deposition (HWCVD) as part of standard micro-fabrication and high spec nanofabrication production lines
Illustration of the industrial readiness of hot wire chemical vapor deposition (HWCVD) as part of standard micro-fabrication and high spec nanofabrication production lines
Tarazona, Antulio
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
de Leon, Maria Theresa
bcccad3c-859e-442f-8386-e800eb32fc7a
Grech, David
8366bdb6-7c29-4537-a41e-7a19370f70aa
Zeimpekis, Ioannis
a2c354ec-3891-497c-adac-89b3a5d96af0
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Ashburn, Peter
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Tarazona, Antulio
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
de Leon, Maria Theresa
bcccad3c-859e-442f-8386-e800eb32fc7a
Grech, David
8366bdb6-7c29-4537-a41e-7a19370f70aa
Zeimpekis, Ioannis
a2c354ec-3891-497c-adac-89b3a5d96af0
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Ashburn, Peter
68cef6b7-205b-47aa-9efb-f1f09f5c1038

Tarazona, Antulio, de Leon, Maria Theresa, Grech, David, Zeimpekis, Ioannis, Sun, Kai, Chong, Harold and Ashburn, Peter (2014) Illustration of the industrial readiness of hot wire chemical vapor deposition (HWCVD) as part of standard micro-fabrication and high spec nanofabrication production lines.

Record type: Conference or Workshop Item (Other)

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More information

Published date: 1 October 2014
Organisations: Optoelectronics Research Centre, Electronics & Computer Science, Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 410227
URI: https://eprints.soton.ac.uk/id/eprint/410227
PURE UUID: 61ee3a11-cd17-460d-9a5f-3d0dda2999e4
ORCID for Harold Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 06 Jun 2017 04:02
Last modified: 14 Mar 2019 01:39

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Contributors

Author: Maria Theresa de Leon
Author: David Grech
Author: Ioannis Zeimpekis
Author: Kai Sun
Author: Harold Chong ORCID iD
Author: Peter Ashburn

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