Low noise vacuum MEMS closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma-delta modulator
Low noise vacuum MEMS closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma-delta modulator
This paper reports on the design, implementation of a novel sixth-order sigma-delta modulator (ΣΔM) MEMS closed-loop accelerometer with extended bandwidth in a vacuum environment (~0.5Torr), which can coexist on a single die (or package) with other sensors requiring vacuum packaging. The fully differential accelerometer sensing element with a large proof mass (4×7mm2) was designed and fabricated on a Silicon-on-Insulator (SOI) wafer with 50μm-thick structural layer. Four electronic integrators were cascaded with the sensing element for high-order noise shaping ability. The local feedback paths created a local resonator producing a notch to further suppress the total in-band quantization noise. Measurement results show the overall noise floor achieved was -120dBg/√Hz, which is equivalent to a noise acceleration value of 1.2μg/√Hz in a 500Hz bandwidth; the scale factor was 950mV/g for input accelerations up to ±6g.
761-764
Chen, F.
52094605-7f42-4242-aa69-fde77aaaa7c3
Yuan, W.
341e150a-034f-4061-bbcb-3230d03539b3
Chang, H.
a2dac1f6-4591-4dc3-9d20-8e6286cd4959
Zeimpekis, I.
a2c354ec-3891-497c-adac-89b3a5d96af0
Kraft, M.
c2ff2439-b909-4af3-824d-9d7c0d14dc3e
1 January 2014
Chen, F.
52094605-7f42-4242-aa69-fde77aaaa7c3
Yuan, W.
341e150a-034f-4061-bbcb-3230d03539b3
Chang, H.
a2dac1f6-4591-4dc3-9d20-8e6286cd4959
Zeimpekis, I.
a2c354ec-3891-497c-adac-89b3a5d96af0
Kraft, M.
c2ff2439-b909-4af3-824d-9d7c0d14dc3e
Chen, F., Yuan, W., Chang, H., Zeimpekis, I. and Kraft, M.
(2014)
Low noise vacuum MEMS closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma-delta modulator.
IEEE 27th International Conference on Micro Electro Mechanical Systems, , San Francisco.
26 - 30 Jan 2014.
.
(doi:10.1109/MEMSYS.2014.6765752).
Record type:
Conference or Workshop Item
(Paper)
Abstract
This paper reports on the design, implementation of a novel sixth-order sigma-delta modulator (ΣΔM) MEMS closed-loop accelerometer with extended bandwidth in a vacuum environment (~0.5Torr), which can coexist on a single die (or package) with other sensors requiring vacuum packaging. The fully differential accelerometer sensing element with a large proof mass (4×7mm2) was designed and fabricated on a Silicon-on-Insulator (SOI) wafer with 50μm-thick structural layer. Four electronic integrators were cascaded with the sensing element for high-order noise shaping ability. The local feedback paths created a local resonator producing a notch to further suppress the total in-band quantization noise. Measurement results show the overall noise floor achieved was -120dBg/√Hz, which is equivalent to a noise acceleration value of 1.2μg/√Hz in a 500Hz bandwidth; the scale factor was 950mV/g for input accelerations up to ±6g.
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Published date: 1 January 2014
Venue - Dates:
IEEE 27th International Conference on Micro Electro Mechanical Systems, , San Francisco, 2014-01-26 - 2014-01-30
Organisations:
Optoelectronics Research Centre, Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 410531
URI: http://eprints.soton.ac.uk/id/eprint/410531
PURE UUID: 0c21b34a-eebe-454d-bb66-937b04847735
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Date deposited: 09 Jun 2017 09:02
Last modified: 16 Mar 2024 04:06
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Contributors
Author:
F. Chen
Author:
W. Yuan
Author:
H. Chang
Author:
M. Kraft
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