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Comparison of Etches for Top-down Fabrication of Polycrystalline Silicon Nanowires

Comparison of Etches for Top-down Fabrication of Polycrystalline Silicon Nanowires
Comparison of Etches for Top-down Fabrication of Polycrystalline Silicon Nanowires
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Hakim, MMA
2c4da711-fc01-499f-958a-d453e1e1d720
Zeimpekis, Ioannis
a2c354ec-3891-497c-adac-89b3a5d96af0
Gunn, Robert
6492aa2c-1754-405e-ac62-0eedf0ed1757
Ashburn, Peter
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Hakim, MMA
2c4da711-fc01-499f-958a-d453e1e1d720
Zeimpekis, Ioannis
a2c354ec-3891-497c-adac-89b3a5d96af0
Gunn, Robert
6492aa2c-1754-405e-ac62-0eedf0ed1757
Ashburn, Peter
68cef6b7-205b-47aa-9efb-f1f09f5c1038

Sun, Kai, Hakim, MMA, Zeimpekis, Ioannis, Gunn, Robert and Ashburn, Peter (2012) Comparison of Etches for Top-down Fabrication of Polycrystalline Silicon Nanowires.

Record type: Conference or Workshop Item (Paper)

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More information

Published date: 1 September 2012
Organisations: Optoelectronics Research Centre, Electronics & Computer Science, Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 410532
URI: https://eprints.soton.ac.uk/id/eprint/410532
PURE UUID: 05428180-f599-4069-8544-add6b4b66129

Catalogue record

Date deposited: 09 Jun 2017 09:02
Last modified: 13 Mar 2019 19:51

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