Laser writing of polycrystalline Si ridge waveguides
Laser writing of polycrystalline Si ridge waveguides
Polycrystalline silicon photonic circuits have been produced using a photolithography-free method that employs spatially selective laser-induced crystallization of amorphous Si films, grown by hot wire chemical vapour deposition (HWCVD), followed by selective chemical etching.
Optical Society of America
Martinez Jimenez, Gregorio
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Franz, Yohann
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Runge, Antoine
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Tarazona, Antulio
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Oo, Swe
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Chong, Harold
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Peacock, Anna
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Healy, Noel
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Ceschia, Matteo
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Mailis, Sakellaris
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26 June 2017
Martinez Jimenez, Gregorio
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Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine
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Tarazona, Antulio
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Oo, Swe
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Chong, Harold
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Peacock, Anna
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Healy, Noel
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Ceschia, Matteo
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Mailis, Sakellaris
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Martinez Jimenez, Gregorio, Franz, Yohann, Runge, Antoine, Tarazona, Antulio, Oo, Swe, Chong, Harold, Peacock, Anna, Healy, Noel, Ceschia, Matteo and Mailis, Sakellaris
(2017)
Laser writing of polycrystalline Si ridge waveguides.
In CLEO/Europe-EQEC.
Optical Society of America..
Record type:
Conference or Workshop Item
(Paper)
Abstract
Polycrystalline silicon photonic circuits have been produced using a photolithography-free method that employs spatially selective laser-induced crystallization of amorphous Si films, grown by hot wire chemical vapour deposition (HWCVD), followed by selective chemical etching.
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Mailis_CLEO_EQEC_2017
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More information
Accepted/In Press date: 23 March 2017
Published date: 26 June 2017
Venue - Dates:
2017 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC), , Munich, Germany, 2017-06-25 - 2017-06-29
Organisations:
Optoelectronics Research Centre, Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 410719
URI: http://eprints.soton.ac.uk/id/eprint/410719
PURE UUID: 11105277-6384-434e-b8ef-1c05118e2ade
Catalogue record
Date deposited: 09 Jun 2017 09:26
Last modified: 16 Mar 2024 03:57
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Contributors
Author:
Gregorio Martinez Jimenez
Author:
Yohann Franz
Author:
Antoine Runge
Author:
Antulio Tarazona
Author:
Swe Oo
Author:
Harold Chong
Author:
Noel Healy
Author:
Matteo Ceschia
Author:
Sakellaris Mailis
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