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Laser writing of polycrystalline Si ridge waveguides

Laser writing of polycrystalline Si ridge waveguides
Laser writing of polycrystalline Si ridge waveguides
Polycrystalline silicon photonic circuits have been produced using a photolithography-free method that employs spatially selective laser-induced crystallization of amorphous Si films, grown by hot wire chemical vapour deposition (HWCVD), followed by selective chemical etching.
Optical Society of America
Mailis, Sakellaris
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Martinez Jimenez, Gregorio
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Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine
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Tarazona, Antulio
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Oo, Swe
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Chong, Harold
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Peacock, Anna
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Healy, Noel
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Ceschia, Matteo
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Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Martinez Jimenez, Gregorio
6f3b34dd-33de-42b0-a69d-56e724da239b
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine
874cec37-209b-4c7a-97a5-56d05596dd2b
Tarazona, Antulio
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Oo, Swe
6495f6da-8f17-4484-98fb-6151b4efbd9a
Chong, Harold
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Peacock, Anna
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Healy, Noel
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Ceschia, Matteo
ea10050f-2846-47db-8c1f-58b6d21b50e9

Mailis, Sakellaris, Martinez Jimenez, Gregorio, Franz, Yohann, Runge, Antoine, Tarazona, Antulio, Oo, Swe, Chong, Harold, Peacock, Anna, Healy, Noel and Ceschia, Matteo (2017) Laser writing of polycrystalline Si ridge waveguides. In CLEO/Europe-EQEC. Optical Society of America..

Record type: Conference or Workshop Item (Paper)

Abstract

Polycrystalline silicon photonic circuits have been produced using a photolithography-free method that employs spatially selective laser-induced crystallization of amorphous Si films, grown by hot wire chemical vapour deposition (HWCVD), followed by selective chemical etching.

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More information

Accepted/In Press date: 23 March 2017
Published date: 26 June 2017
Venue - Dates: 2017 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC), Munich, Germany, 2017-06-25 - 2017-06-29
Organisations: Optoelectronics Research Centre, Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 410719
URI: https://eprints.soton.ac.uk/id/eprint/410719
PURE UUID: 11105277-6384-434e-b8ef-1c05118e2ade
ORCID for Sakellaris Mailis: ORCID iD orcid.org/0000-0001-8100-2670
ORCID for Harold Chong: ORCID iD orcid.org/0000-0002-7110-5761
ORCID for Anna Peacock: ORCID iD orcid.org/0000-0002-1940-7172

Catalogue record

Date deposited: 09 Jun 2017 09:26
Last modified: 12 Oct 2019 00:38

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Contributors

Author: Gregorio Martinez Jimenez
Author: Yohann Franz
Author: Antoine Runge
Author: Swe Oo
Author: Harold Chong ORCID iD
Author: Anna Peacock ORCID iD
Author: Noel Healy
Author: Matteo Ceschia

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