Cotter, J.P., Zeimpekis, Ioannis, Kraft, Michael and Hinds, E.A. (2013) Improved surface quality of anisotropically etched silicon {111} planes for mm-scale optics. Microelectronic Engineering, 1032-1042, [5].
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Published date: 1 October 2013
Organisations:
Optoelectronics Research Centre
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Local EPrints ID: 411464
URI: http://eprints.soton.ac.uk/id/eprint/411464
ISSN: 0167-9317
PURE UUID: 34bf5c46-957e-4929-860e-6a842cf67a5a
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Date deposited: 20 Jun 2017 16:31
Last modified: 21 Sep 2024 01:46
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Author:
J.P. Cotter
Author:
Michael Kraft
Author:
E.A. Hinds
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