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Single stage deflection amplification mechanism in a SOG capacitive accelerometer

Single stage deflection amplification mechanism in a SOG capacitive accelerometer
Single stage deflection amplification mechanism in a SOG capacitive accelerometer
This work discusses on a novel mechanical amplification concept for micro-electro-mechanical systems (MEMS). A single stage deflection amplifying mechanism, comprising microlevers, is implemented for a single axis in-plane capacitive accelerometer. Such a mechanism can provide a higher signal to noise ratio in a wide bandwidth with improved performance. Results from the analysis and evaluation of the fabricated prototype sensor are presented in this paper.
883-886
Zeimpekis, Ioannis
a2c354ec-3891-497c-adac-89b3a5d96af0
Kraft, Michael
c2ff2439-b909-4af3-824d-9d7c0d14dc3e
Zeimpekis, Ioannis
a2c354ec-3891-497c-adac-89b3a5d96af0
Kraft, Michael
c2ff2439-b909-4af3-824d-9d7c0d14dc3e

Zeimpekis, Ioannis and Kraft, Michael (2009) Single stage deflection amplification mechanism in a SOG capacitive accelerometer. Eurosensors XXIII, Lausanne, Switzerland. 06 - 09 Sep 2009. pp. 883-886 . (doi:10.1016/j.proche.2009.07.220).

Record type: Conference or Workshop Item (Paper)

Abstract

This work discusses on a novel mechanical amplification concept for micro-electro-mechanical systems (MEMS). A single stage deflection amplifying mechanism, comprising microlevers, is implemented for a single axis in-plane capacitive accelerometer. Such a mechanism can provide a higher signal to noise ratio in a wide bandwidth with improved performance. Results from the analysis and evaluation of the fabricated prototype sensor are presented in this paper.

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e-pub ahead of print date: 4 September 2009
Venue - Dates: Eurosensors XXIII, Lausanne, Switzerland, 2009-09-06 - 2009-09-09
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 411465
URI: http://eprints.soton.ac.uk/id/eprint/411465
DOI: doi:10.1016/j.proche.2009.07.220
PURE UUID: 1b0e3cb3-2d40-4aa1-af91-c961599f3a91
ORCID for Ioannis Zeimpekis: ORCID iD orcid.org/0000-0002-7455-1599

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Date deposited: 20 Jun 2017 16:31
Last modified: 16 Mar 2024 04:06

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Author: Ioannis Zeimpekis ORCID iD
Author: Michael Kraft

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