Phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguides
Phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguides
We demonstrate a new post-fabrication trimming technique to fine-tune the phase of integrated Mach-Zehnder Interferometers (MZIs), enabling permanent correction of typical fabrication based phase errors. Preliminary results demonstrate a phase trimming accuracy of 0.146π.
silicon photonics
Chen, Xia
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Milošević, Milan
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Thomson, David
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Khokhar, Ali
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Franz, Yohann
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Runge, Antoine
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Mailis, Sakellaris
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Peacock, Anna
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Reed, Graham
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26 October 2017
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Milošević, Milan
b28da945-84a5-4317-8896-6d9ea6a69589
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine
874cec37-209b-4c7a-97a5-56d05596dd2b
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Chen, Xia, Milošević, Milan, Thomson, David, Khokhar, Ali, Franz, Yohann, Runge, Antoine, Mailis, Sakellaris, Peacock, Anna and Reed, Graham
(2017)
Phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguides.
2017 IEEE 14th International Conference on Group IV Photonics (GFP), , Berlin, Germany.
23 - 25 Aug 2017.
2 pp
.
(doi:10.1109/GROUP4.2017.8082185).
Record type:
Conference or Workshop Item
(Paper)
Abstract
We demonstrate a new post-fabrication trimming technique to fine-tune the phase of integrated Mach-Zehnder Interferometers (MZIs), enabling permanent correction of typical fabrication based phase errors. Preliminary results demonstrate a phase trimming accuracy of 0.146π.
Text
GroupIV_MZI_lasertrimming_v3
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Accepted/In Press date: 2 June 2017
e-pub ahead of print date: 26 October 2017
Published date: 26 October 2017
Venue - Dates:
2017 IEEE 14th International Conference on Group IV Photonics (GFP), , Berlin, Germany, 2017-08-23 - 2017-08-25
Keywords:
silicon photonics
Organisations:
Optoelectronics Research Centre, Photonic Systems Circuits & Sensors
Identifiers
Local EPrints ID: 411740
URI: http://eprints.soton.ac.uk/id/eprint/411740
PURE UUID: 89ef56dd-7ceb-48a4-b5a8-ceb5c9a43c10
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Date deposited: 23 Jun 2017 16:31
Last modified: 16 Mar 2024 03:31
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Contributors
Author:
Xia Chen
Author:
Milan Milošević
Author:
Ali Khokhar
Author:
Yohann Franz
Author:
Antoine Runge
Author:
Sakellaris Mailis
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