Thermodynamic control of MEMS meteorology pressure sensing element in low-temperature application down to −45°C
Thermodynamic control of MEMS meteorology pressure sensing element in low-temperature application down to −45°C
Du, Lidong
708ad78b-9822-478d-b763-9194167b2161
Zhao, Zhan
c4bb0898-36df-41cc-b7f0-690347ab68f0
Fang, Zhen
35c672b8-62a3-41c1-843b-d790a620ecf7
Feng, Yu
631d9d39-ac55-4282-ab98-5b7d0dd2682e
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Du, Lidong
708ad78b-9822-478d-b763-9194167b2161
Zhao, Zhan
c4bb0898-36df-41cc-b7f0-690347ab68f0
Fang, Zhen
35c672b8-62a3-41c1-843b-d790a620ecf7
Feng, Yu
631d9d39-ac55-4282-ab98-5b7d0dd2682e
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Du, Lidong, Zhao, Zhan, Fang, Zhen, Feng, Yu and Yan, Jize
(2017)
Thermodynamic control of MEMS meteorology pressure sensing element in low-temperature application down to −45°C.
IET Science, Measurement & Technology.
(doi:10.1049/iet-smt.2017.0057).
Text
Thermodynamic control of MEMS
- Accepted Manuscript
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Accepted/In Press date: 16 May 2017
e-pub ahead of print date: 18 July 2017
Identifiers
Local EPrints ID: 412539
URI: http://eprints.soton.ac.uk/id/eprint/412539
ISSN: 1751-8830
PURE UUID: 984d29e7-a9dc-410c-9328-8daa101b8a48
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Date deposited: 20 Jul 2017 16:30
Last modified: 16 Mar 2024 04:23
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Author:
Lidong Du
Author:
Zhan Zhao
Author:
Zhen Fang
Author:
Yu Feng
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