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Thermodynamic control of MEMS meteorology pressure sensing element in low-temperature application down to −45°C

Thermodynamic control of MEMS meteorology pressure sensing element in low-temperature application down to −45°C
Thermodynamic control of MEMS meteorology pressure sensing element in low-temperature application down to −45°C
1751-8830
Du, Lidong
708ad78b-9822-478d-b763-9194167b2161
Zhao, Zhan
c4bb0898-36df-41cc-b7f0-690347ab68f0
Fang, Zhen
35c672b8-62a3-41c1-843b-d790a620ecf7
Feng, Yu
631d9d39-ac55-4282-ab98-5b7d0dd2682e
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Du, Lidong
708ad78b-9822-478d-b763-9194167b2161
Zhao, Zhan
c4bb0898-36df-41cc-b7f0-690347ab68f0
Fang, Zhen
35c672b8-62a3-41c1-843b-d790a620ecf7
Feng, Yu
631d9d39-ac55-4282-ab98-5b7d0dd2682e
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828

Du, Lidong, Zhao, Zhan, Fang, Zhen, Feng, Yu and Yan, Jize (2017) Thermodynamic control of MEMS meteorology pressure sensing element in low-temperature application down to −45°C. IET Science, Measurement & Technology. (doi:10.1049/iet-smt.2017.0057).

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Thermodynamic control of MEMS - Accepted Manuscript
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Accepted/In Press date: 16 May 2017
e-pub ahead of print date: 18 July 2017

Identifiers

Local EPrints ID: 412539
URI: http://eprints.soton.ac.uk/id/eprint/412539
ISSN: 1751-8830
PURE UUID: 984d29e7-a9dc-410c-9328-8daa101b8a48
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

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Date deposited: 20 Jul 2017 16:30
Last modified: 07 Oct 2020 02:08

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Contributors

Author: Lidong Du
Author: Zhan Zhao
Author: Zhen Fang
Author: Yu Feng
Author: Jize Yan ORCID iD

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