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Towards autonomous testing of photonic integrated circuits

Towards autonomous testing of photonic integrated circuits
Towards autonomous testing of photonic integrated circuits
A crucial component of any large scale manufacturing line is the development of autonomous testing at the wafer scale. This work offers a solution through the fabrication of grating couplers in the silicon-on-insulator platform via ion implantation. The grating is subsequently erased after testing using laser annealing without affecting the optical performance of the photonic circuit. Experimental results show the possibility for the realisation of low loss, compact solutions which may revolutionise photonic wafer-scale testing. The process is CMOS compatible and can be implemented in other platforms to realise more complex systems such as multilayer photonics or programmable optical circuits.
1010817
SPIE
Milošević, Milan
b28da945-84a5-4317-8896-6d9ea6a69589
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Cao, Wei
6194b5dd-d4e9-40d0-b5fb-b264d72fe594
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Reed, Graham T.
Knights, Andrew P.
Milošević, Milan
b28da945-84a5-4317-8896-6d9ea6a69589
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Cao, Wei
6194b5dd-d4e9-40d0-b5fb-b264d72fe594
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Reed, Graham T.
Knights, Andrew P.

Milošević, Milan, Chen, Xia, Cao, Wei, Khokhar, Ali Z., Thomson, David J. and Reed, Graham T. (2017) Towards autonomous testing of photonic integrated circuits. Reed, Graham T. and Knights, Andrew P. (eds.) In Proceedings of Spie: Silicon Photonics XII. vol. 10108, SPIE. p. 1010817 . (doi:10.1117/12.2251315).

Record type: Conference or Workshop Item (Paper)

Abstract

A crucial component of any large scale manufacturing line is the development of autonomous testing at the wafer scale. This work offers a solution through the fabrication of grating couplers in the silicon-on-insulator platform via ion implantation. The grating is subsequently erased after testing using laser annealing without affecting the optical performance of the photonic circuit. Experimental results show the possibility for the realisation of low loss, compact solutions which may revolutionise photonic wafer-scale testing. The process is CMOS compatible and can be implemented in other platforms to realise more complex systems such as multilayer photonics or programmable optical circuits.

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Published date: 20 February 2017

Identifiers

Local EPrints ID: 413639
URI: https://eprints.soton.ac.uk/id/eprint/413639
PURE UUID: 79faffca-5eba-40c4-af32-ac8a92013117
ORCID for Xia Chen: ORCID iD orcid.org/0000-0002-0994-5401
ORCID for Wei Cao: ORCID iD orcid.org/0000-0003-1431-7060

Catalogue record

Date deposited: 31 Aug 2017 16:31
Last modified: 09 Apr 2019 00:31

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Contributors

Author: Xia Chen ORCID iD
Author: Wei Cao ORCID iD
Author: Ali Z. Khokhar
Author: Graham T. Reed
Editor: Graham T. Reed
Editor: Andrew P. Knights

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