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RF characterisation of CMOS-compatible silicon-on-insulator nanoelectromechanical resonators

RF characterisation of CMOS-compatible silicon-on-insulator nanoelectromechanical resonators
RF characterisation of CMOS-compatible silicon-on-insulator nanoelectromechanical resonators
Tsuchiya, Yoshishige
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Harada, Naoaki
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Giotis, Christos
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Lamb, Joshua
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Arab Hassani, Faezeh
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Shikida, Mitsuhiro
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Dupré, Cecilia
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Ollier, Eric
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Bartsch, Sebastian
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Mihai Ionescu, Adrian
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Mizuta, H.
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Tsuchiya, Yoshishige
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Harada, Naoaki
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Giotis, Christos
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Lamb, Joshua
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Arab Hassani, Faezeh
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Shikida, Mitsuhiro
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Dupré, Cecilia
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Ollier, Eric
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Bartsch, Sebastian
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Mihai Ionescu, Adrian
201d6d24-14dc-496b-939e-20b98af6a35f
Mizuta, H.
c03e841e-f9cf-4f99-99a0-2a9261fb1345

Tsuchiya, Yoshishige, Harada, Naoaki, Giotis, Christos, Lamb, Joshua, Arab Hassani, Faezeh, Shikida, Mitsuhiro, Dupré, Cecilia, Ollier, Eric, Bartsch, Sebastian, Mihai Ionescu, Adrian and Mizuta, H. (2017) RF characterisation of CMOS-compatible silicon-on-insulator nanoelectromechanical resonators. In 43rd International Conference on Micro and Nanoengineering (MNE2017), Braga, Portugal. Sep. 18-22 2017. (In Press)

Record type: Conference or Workshop Item (Paper)
Text
MNE2017Abstract_Yoshi_Final - Accepted Manuscript
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More information

Accepted/In Press date: 29 June 2017
Venue - Dates: 43rd International Conference on Micro and Nanoengineering, Portugal, 2017-09-18 - 2017-09-22

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Local EPrints ID: 413831
URI: http://eprints.soton.ac.uk/id/eprint/413831
PURE UUID: 713d468c-0295-42b0-b8cb-c2f23b94b5e7

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Date deposited: 07 Sep 2017 16:32
Last modified: 07 Oct 2020 04:07

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